Desktop nanofabrication with massively multiplexed beam pen lithography

Nature Communications

Volumn 4, Issue , 2013, Pages

  Liao, Xing ^a,b   Brown, Keith A ^b,c   Schmucker, Abrin L ^b,c   Liu, Guoliang ^b,c   He, Shu ^b,c   Shim, Wooyoung ^a,b   Mirkin, Chad A ^a,b,c  

^a Northwestern University   (United States)

^b NORTHWESTERN UNIVERSITY   (United States)

^c NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOMATERIAL; NANOWIRE;

BIOTECHNOLOGY; COST-BENEFIT ANALYSIS; DIFFRACTION; ELECTRONIC EQUIPMENT; MEDICINE; NANOTECHNOLOGY; PATTERN RECOGNITION; PHOTOCHEMISTRY;

ANALYTIC METHOD; ARTICLE; CHEMICAL STRUCTURE; DIFFRACTION; MULTIPLEXED BEAM PEN LITHOGRAPHY; NANOFABRICATION; PHOTOCHEMISTRY; SCANNING ELECTRON MICROSCOPY; ULTRAVIOLET RADIATION;

ELECTRONICS; NANOSTRUCTURES; NANOTECHNOLOGY; PHOTOCHEMICAL PROCESSES; PRINTING; SURFACE PROPERTIES;

EID: 84880859355     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms3103     Document Type: Article

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