Computational modeling of block-copolymer directed self-assembly

Journal of Polymer Science, Part B: Polymer Physics

Volumn 53, Issue 2, 2015, Pages 90-95

  Ginzburg, Valeriy V ^a   Weinhold, Jeffrey D ^a   Trefonas, Peter ^b  

^a DOW CHEMICAL COMPANY   (United States)

^b Dow Electronic Materials   (United States)

Author keywords

Block copolymers; Chemoepitaxy; Computer modeling; Directed self assembly; Graphoepitaxy; Molecular Dynamics; Monte Carlo simulations; Self Consistent Field Theory

Indexed keywords

BLOCK COPOLYMERS; COMPUTATION THEORY; DEFECT DENSITY; DENSITY FUNCTIONAL THEORY; INTELLIGENT SYSTEMS; MEAN FIELD THEORY; MOLECULAR DYNAMICS; MOLECULAR ORBITALS; MONTE CARLO METHODS; SEMICONDUCTOR DEVICE MANUFACTURE;

CHEMOEPITAXY; COMPUTER MODELING; DIRECTED SELF-ASSEMBLY; GRAPHOEPITAXY; SELF CONSISTENT FIELD THEORY;

SELF ASSEMBLY;

EID: 84918544438     PISSN: 08876266     EISSN: 10990488     Source Type: Journal    
DOI: 10.1002/polb.23365     Document Type: Review

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