Power coupling and electrical characterization of a radio-frequency micro atmospheric pressure plasma jet

Plasma Sources Science and Technology

Volumn 23, Issue 6, 2014, Pages

  Marinov, D ^a   Braithwaite, N St J ^a  

^a OPEN UNIVERSITY   (United Kingdom)

Author keywords

atmospheric pressure plasma; electrical characterization; radio frequency discharge; radio frequency power matching

Indexed keywords

ATMOSPHERIC PRESSURE; CHARACTERIZATION; HELIUM; PLASMA JETS; PLASMA SOURCES; RADIO WAVES; RESONANT CIRCUITS;

APPLIED VOLTAGES; ATMOSPHERIC PRESSURE PLASMA JETS; ATMOSPHERIC PRESSURE PLASMAS; ELECTRICAL CHARACTERIZATION; RADIO FREQUENCIES; RADIO FREQUENCY DISCHARGES; RADIO FREQUENCY POWER; RESONANT ELEMENTS;

ELECTRIC DISCHARGES;

EID: 84915767586     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/23/6/062005     Document Type: Article

References (20)

1. Schütze A, Jeong J Y, Babayan S E, Park J, Selwyn G S and Hicks R F 1998 The atmospheric-pressure plasma jet?: a review and comparison to other plasma sources IEEE Trans. Plasma Sci. 26 1685-94
2. Balcon N, Aanesland A and Boswell R 2007 Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon Plasma Sources Sci. Technol. 16 217-25
3. Raballand V, Benedikt J, Hoffmann S, Zimmermann M and von Keudell A 2009 Deposition of silicon dioxide films using an atmospheric pressure microplasma jet J. Appl. Phys. 105 083304
4. Stoffels E, Flikweert A J, Stoffels W W and Kroesen G M W 2002 Plasma needle: a non-destructive atmospheric plasma source for fine surface treatment of (bio)materials Plasma Sources Sci. Technol. 11 383-8
5. Park G Y, Park S J, Choi M Y, Koo I G, Byun J H, Hong J W, Sim J Y, Collins G J and Lee J K 2012 Atmospheric-pressure plasma sources for biomedical applications Plasma Sources Sci. Technol. 21 043001
6. Schulz-von der Gathen V, Schaper L, Knake N, Reuter S, Niemi K, Gans T and Winter J 2008 Spatially resolved diagnostics on a microscale atmospheric pressure plasma jet J. Phys. D: Appl. Phys. 41 194004
7. Niemi K, Waskoenig J, Sadeghi N, Gans T and O'Connell D 2011 The role of helium metastable states in radio-frequency driven helium-oxygen atmospheric pressure plasma jets: measurement and numerical simulation Plasma Sources Sci. Technol. 20 055005
8. Niemi K, O'Connell D, de Oliveira N, Joyeux D, Nahon L, Booth J P and Gans T 2013 Absolute atomic oxygen and nitrogen densities in radio-frequency driven atmospheric pressure cold plasmas: synchrotron vacuum ultra-violet high-resolution Fourier-transform absorption measurements Appl. Phys. Lett. 103 034102
9. Ellerweg D, Benedikt J, von Keudell A, Knake N and Schulz-von der Gathen V 2010 Characterization of the effluent of a He/O2 microscale atmospheric pressure plasma jet by quantitative molecular beam mass spectrometry New J. Phys. 12 013021
10. Waskoenig J, Niemi K, Knake N, Graham L M, Reuter S, Schulz-von der Gathen V and Gans T 2010 Diagnostic-based modeling on a micro-scale atmospheric-pressure plasma jet Pure Appl. Chem. 82 1209-22
11. Waskoenig J 2010 Numerical simulations of the electron dynamics in single and dual radio-frequency driven atmospheric pressure plasmas and associated plasma chemistry in electro-negative He-O2 mixtures Thesis Queens's University Belfast
12. Waskoenig J, Niemi K, Knake N, Graham L M, Reuter S, Schulz-von der Gathen V and Gans T 2010 Atomic oxygen formation in a radio-frequency driven micro-atmospheric pressure plasma jet Plasma Sources Sci. Technol. 19 045018
13. Lazzaroni C, Chabert P, Lieberman M A, Lichtenberg A J and Leblanc A 2012 Analytical-numerical global model of atmospheric-pressure radio-frequency capacitive discharges Plasma Sources Sci. Technol. 21 035013
14. Lazzaroni C, Lieberman M A, Lichtenberg A J and Chabert P 2012 Comparison of a hybrid model to a global model of atmospheric pressure radio-frequency capacitive discharges J. Phys. D: Appl. Phys. 45 495204
15. Niemi K, Gans T and O'Connell D 2013 Comparison of a global model to semi-kinetic fluid simulations for atmospheric pressure radio-frequency plasmas Plasma Sources Sci. Technol. 22 032001
16. Kawamura E, Lieberman M A, Lichtenberg A J, Chabert P and Lazzaroni C 2014 Particle-in-cell and global simulations of α to γ transition in atmospheric pressure Penning-dominated capacitive discharges Plasma Sources Sci. Technol. 23 035014
17. Godyak V 1990 In situ simultaneous radio frequency discharge power measurements J. Vac. Sci. Technol. A 8 3833
18. Godyak V, Piejak R B and Alexandrovich B M 1991 Electrical characteristics of parallel-plate RF discharges in argon IEEE Trans. Plasma Sci. 19 660-76
19. Moon S Y, Rhee J K, Kim D B and Choe W 2006 A, Γ, and normal, abnormal glow discharge modes in radio-frequency capacitively coupled discharges at atmospheric pressure Phys. Plasmas 13 033502
20. Yang X, Moravej M, Nowling G R, Babayan S E, Panelon J, Chang J P and Hicks R F 2005 Comparison of an atmospheric pressure, radio-frequency discharge operating in the α and γ modes Plasma Sources Sci. Technol. 14 314-20