Comparison of a hybrid model to a global model of atmospheric pressure radio-frequency capacitive discharges

Journal of Physics D: Applied Physics

Volumn 45, Issue 49, 2012, Pages

  Lazzaroni, C ^a   Lieberman, M A ^b   Lichtenberg, A J ^b   Chabert, P ^c  

^a UNIVERSITÉ PARIS 13   (France)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATED PROCESS; CAPACITIVE DISCHARGES; CURRENT-DRIVEN; DISCHARGE PARAMETERS; ELECTRICAL CHARACTERISTIC; ELECTRON POWER; FEED GAS; GASPHASE; GLOBAL MODELS; HYBRID MODEL; OPERATING REGIMES; PARTICLE BALANCE; PARTICLE DENSITIES; RADIO FREQUENCIES; RATE COEFFICIENTS; RF-POWER; SMALL DEVICES; TEMPERATURE DEPENDENT; TIME VARYING; TIME-SCALES;

ELECTRON TEMPERATURE; HELIUM;

ATMOSPHERIC PRESSURE;

EID: 84870208552     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/49/495204     Document Type: Article

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