Development of a low-cost micro-CMM for 3D micro/nano measurements

Measurement Science and Technology

Volumn 17, Issue 3, 2006, Pages 524-532

  Fan, K C ^a,b   Fei, Y T ^a   Yu, X F ^a   Chen, Y J ^a   Wang, W L ^a   Chen, F ^a   Liu, Y S ^a  

^a HEFEI UNIVERSITY OF TECHNOLOGY   (China)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Arch bridge; Co planar stage; Focusing probe; Micro CMM; Nanometre accuracy

Indexed keywords

DIFFRACTION GRATINGS; INTERFEROMETERS; LASERS; MICROMETERS; OPTICAL RESOLVING POWER; PIEZOELECTRIC DEVICES; POSITION CONTROL; PROBES; THREE DIMENSIONAL;

ARCH BRIDGE; CO-PLANAR STAGE; FOCUSING PROBE; MICRO-CMM; NANOMETRE ACCURACY;

COORDINATE MEASURING MACHINES;

COORDINATE MEASURING MACHINES; DIFFRACTION GRATINGS; INTERFEROMETERS; LASERS; MICROMETERS; OPTICAL RESOLVING POWER; PIEZOELECTRIC DEVICES; POSITION CONTROL; PROBES;

EID: 31644449683     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/3/S12     Document Type: Article

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