Nanopositioning control on a commercial linear stage by software error correction

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

Volumn 4, Issue 1, 2006, Pages 1-9

  Fan, Kuang Chao ^a,b   Cheng, Fang ^a   Chen, Ye Jin ^a  

^a HEFEI UNIVERSITY OF TECHNOLOGY   (China)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Back propagation neural network; Digital control; Nanopositioning; PID control; Subdivision; Waveform correction

Indexed keywords

BACK PROPAGATION NEURAL NETWORK; LISSAJOUS CIRCLE; NANOPOSITIONING CONTROL; PIEZO ACTUATOR; PIEZO CERAMIC LINEAR MOTOR (PCLM); SUBDIVISION; WAVEFORM CORRECTION;

ACTUATORS; DIGITAL CONTROL SYSTEMS; ELECTRIC DISTORTION; ERROR CORRECTION; FEEDBACK CONTROL; HARDWARE; LINEAR MOTORS; MOTION CONTROL; NANOTECHNOLOGY; NEURAL NETWORKS; THREE TERM CONTROL SYSTEMS;

POSITION CONTROL;

EID: 33646724528     PISSN: 16726030     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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