메뉴 건너뛰기




Volumn 208, Issue , 2015, Pages 327-333

Fabrication of silver interdigitated electrodes on polyimide films via surface modification and ion-exchange technique and its flexible humidity sensor application

Author keywords

Adsorption model; Ag metallization; Flexible; Humidity sensor; Polyimide PAA

Indexed keywords

ELECTRODES; HUMIDITY SENSORS; ION EXCHANGE; METALLIZING; POLYIMIDES; SILVER;

EID: 84911922503     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2014.11.043     Document Type: Article
Times cited : (106)

References (28)
  • 1
    • 2342620675 scopus 로고    scopus 로고
    • A novel capacitive-type humidity sensor using CMOS fabrication technology
    • L. Gu, Q.-A. Huang, and M. Qin A novel capacitive-type humidity sensor using CMOS fabrication technology Sens. Actuators B: Chem. 99 2004 491 498
    • (2004) Sens. Actuators B: Chem. , vol.99 , pp. 491-498
    • Gu, L.1    Huang, Q.-A.2    Qin, M.3
  • 2
    • 33947161536 scopus 로고    scopus 로고
    • A capacitive humidity sensor integrated with micro heater and ring oscillator circuit fabricated by CMOS-MEMS technique
    • C.-L. Dai A capacitive humidity sensor integrated with micro heater and ring oscillator circuit fabricated by CMOS-MEMS technique Sens. Actuators B: Chem. 122 2007 375 380
    • (2007) Sens. Actuators B: Chem. , vol.122 , pp. 375-380
    • Dai, C.-L.1
  • 3
    • 56049094783 scopus 로고    scopus 로고
    • A novel method to fabricate ion-doped microporous polyimide structures for ultra-high sensitive humidity sensing
    • C.-H. Chen, and C.-H. Lin A novel method to fabricate ion-doped microporous polyimide structures for ultra-high sensitive humidity sensing Sens. Actuators B: Chem. 135 2008 276 282
    • (2008) Sens. Actuators B: Chem. , vol.135 , pp. 276-282
    • Chen, C.-H.1    Lin, C.-H.2
  • 4
    • 65449158324 scopus 로고    scopus 로고
    • Fabrication of high-speed polyimide-based humidity sensor using anisotropic and isotropic etching with ICP
    • J.S. Kim, M.J. Lee, M.-S. Kang, K.-P. Yoo, K.-H. Kwon, and V.R. Singh Fabrication of high-speed polyimide-based humidity sensor using anisotropic and isotropic etching with ICP Thin Solid Films 517 2009 3879 3882
    • (2009) Thin Solid Films , vol.517 , pp. 3879-3882
    • Kim, J.S.1    Lee, M.J.2    Kang, M.-S.3    Yoo, K.-P.4    Kwon, K.-H.5    Singh, V.R.6
  • 8
    • 47049098848 scopus 로고    scopus 로고
    • A novel fabrication process of MEMS devices on polyimide flexible substrates
    • S.Y. Xiao, L.F. Che, X.X. Li, and Y.L. Wang A novel fabrication process of MEMS devices on polyimide flexible substrates Microelectron. Eng. 85 2008 452 457
    • (2008) Microelectron. Eng. , vol.85 , pp. 452-457
    • Xiao, S.Y.1    Che, L.F.2    Li, X.X.3    Wang, Y.L.4
  • 10
    • 47649131551 scopus 로고    scopus 로고
    • Fabrication of micro sensors on a flexible substrate
    • C.-Y. Lee, G.-W. Wu, and W.-J. Hsieh Fabrication of micro sensors on a flexible substrate Sens. Actuators A: Phys. 147 2008 173 176
    • (2008) Sens. Actuators A: Phys. , vol.147 , pp. 173-176
    • Lee, C.-Y.1    Wu, G.-W.2    Hsieh, W.-J.3
  • 12
    • 84877766104 scopus 로고    scopus 로고
    • Preparation of flexible resistive micro-humidity sensors and their humidity-sensing properties
    • D.-I. Lim, J.-R. Cha, and M.-S. Gong Preparation of flexible resistive micro-humidity sensors and their humidity-sensing properties Sens. Actuators B: Chem. 183 2013 574 582
    • (2013) Sens. Actuators B: Chem. , vol.183 , pp. 574-582
    • Lim, D.-I.1    Cha, J.-R.2    Gong, M.-S.3
  • 15
    • 0038036094 scopus 로고    scopus 로고
    • Surface modification-based synthesis and microstructural tuning of nanocomposite layers: Monodispersed copper nanoparticles in polyimide resins
    • K. Akamatsu, S. Ikeda, H. Nawafune, and S. Deki Surface modification-based synthesis and microstructural tuning of nanocomposite layers: monodispersed copper nanoparticles in polyimide resins Chem. Mater. 15 2003 2488 2491
    • (2003) Chem. Mater. , vol.15 , pp. 2488-2491
    • Akamatsu, K.1    Ikeda, S.2    Nawafune, H.3    Deki, S.4
  • 16
    • 6444226767 scopus 로고    scopus 로고
    • Formation and growth of copper nanoparticles from ion-doped precursor polyimide layers
    • S. Ikeda, K. Akamatsu, H. Nawafune, T. Nishino, and S. Deki Formation and growth of copper nanoparticles from ion-doped precursor polyimide layers J. Phys. Chem. B 108 2004 15599 15607
    • (2004) J. Phys. Chem. B , vol.108 , pp. 15599-15607
    • Ikeda, S.1    Akamatsu, K.2    Nawafune, H.3    Nishino, T.4    Deki, S.5
  • 17
    • 27144534217 scopus 로고    scopus 로고
    • Preparation of surface conductive and highly reflective silvered polyimide films by surface modification and in situ self-metallization technique
    • Z. Wu, D. Wu, S. Qi, T. Zhang, and R. Jin Preparation of surface conductive and highly reflective silvered polyimide films by surface modification and in situ self-metallization technique Thin Solid Films 493 2005 179 184
    • (2005) Thin Solid Films , vol.493 , pp. 179-184
    • Wu, Z.1    Wu, D.2    Qi, S.3    Zhang, T.4    Jin, R.5
  • 18
    • 33644662976 scopus 로고    scopus 로고
    • Preparation of highly reflective and conductive metallized polyimide films through surface modification: Processing, morphology and properties
    • Z. Wu, D. Wu, W. Yang, and R. Jin Preparation of highly reflective and conductive metallized polyimide films through surface modification: processing, morphology and properties J. Mater. Chem. 16 2006 310 316
    • (2006) J. Mater. Chem. , vol.16 , pp. 310-316
    • Wu, Z.1    Wu, D.2    Yang, W.3    Jin, R.4
  • 20
    • 79958134742 scopus 로고    scopus 로고
    • Humidity sensing behavior of silicon nanowires with hexamethyldisilazane modification
    • X. Chen, J. Zhang, Z. Wang, Q. Yan, and S. Hui Humidity sensing behavior of silicon nanowires with hexamethyldisilazane modification Sens. Actuators B: Chem. 156 2011 631 636
    • (2011) Sens. Actuators B: Chem. , vol.156 , pp. 631-636
    • Chen, X.1    Zhang, J.2    Wang, Z.3    Yan, Q.4    Hui, S.5
  • 21
    • 55049090184 scopus 로고    scopus 로고
    • High-performance capacitive humidity sensor based on silicon nanoporous pillar array
    • L.Y. Li, Y.F. Dong, W.F. Jiang, H.F. Ji, and X.J. Li High-performance capacitive humidity sensor based on silicon nanoporous pillar array Thin Solid Films 517 2008 948 951
    • (2008) Thin Solid Films , vol.517 , pp. 948-951
    • Li, L.Y.1    Dong, Y.F.2    Jiang, W.F.3    Ji, H.F.4    Li, X.J.5
  • 22
    • 0001674603 scopus 로고
    • Over the adsorption in solution
    • H.M.F. Freundlich Over the adsorption in solution J. Phys. Chem. 57 1906 385 470
    • (1906) J. Phys. Chem. , vol.57 , pp. 385-470
    • Freundlich, H.M.F.1
  • 23
    • 84870168499 scopus 로고    scopus 로고
    • Adsorption behaviour of La(III) and Eu(III) ions from aqueous solutions by hydroxyapatite: Kinetic, isotherm, and thermodynamic studies
    • F. Granados-Correa, J. Vilchis-Granados, M. Jiménez-Reyes, and L.A. Quiroz-Granados Adsorption behaviour of La(III) and Eu(III) ions from aqueous solutions by hydroxyapatite: kinetic, isotherm, and thermodynamic studies J. Chem. 2013 2013 1 9
    • (2013) J. Chem. , vol.2013 , pp. 1-9
    • Granados-Correa, F.1    Vilchis-Granados, J.2    Jiménez-Reyes, M.3    Quiroz-Granados, L.A.4
  • 24
    • 0036248407 scopus 로고    scopus 로고
    • Adsorption of Au(I, III) complexes on Fe, Mn oxides and humic acid
    • Y. Ran, J. Fu, A.W. Rate, and R.J. Gilkes Adsorption of Au(I, III) complexes on Fe, Mn oxides and humic acid Chem. Geol. 185 2002 33 49
    • (2002) Chem. Geol. , vol.185 , pp. 33-49
    • Ran, Y.1    Fu, J.2    Rate, A.W.3    Gilkes, R.J.4
  • 26
    • 0036841105 scopus 로고    scopus 로고
    • Solubility-normalized combined adsorption-partitioning sorption isotherms for organic pollutants
    • S. Kleineidam, C. Schüth, and P. Grathwohl Solubility-normalized combined adsorption-partitioning sorption isotherms for organic pollutants Environ. Sci. Technol. 36 2002 4689 4697
    • (2002) Environ. Sci. Technol. , vol.36 , pp. 4689-4697
    • Kleineidam, S.1    Schüth, C.2    Grathwohl, P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.