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Volumn 135, Issue 1, 2008, Pages 276-282

A novel method to fabricate ion-doped microporous polyimide structures for ultra-high sensitive humidity sensing

Author keywords

Deliquescence salt; Doping; Humidity sensor; Microporous; Polyimide

Indexed keywords

ETHANOL; HUMIDITY SENSORS; IONS; METEOROLOGY; MICROPOROSITY; MOISTURE; POLYIMIDES; POLYMERS; SENSORS;

EID: 56049094783     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.08.034     Document Type: Article
Times cited : (26)

References (30)
  • 1
    • 0037186194 scopus 로고    scopus 로고
    • Recent achievements in miniaturised humidity sensors-a review of transduction techniques
    • Rittersma Z.M. Recent achievements in miniaturised humidity sensors-a review of transduction techniques. Sens. Actuators A 96 (2002) 196-210
    • (2002) Sens. Actuators A , vol.96 , pp. 196-210
    • Rittersma, Z.M.1
  • 2
    • 33745694516 scopus 로고    scopus 로고
    • Humidity sensors: a review
    • Lee C.Y., and Lee G.B. Humidity sensors: a review. Sens. Lett. 3 (2005) 1-15
    • (2005) Sens. Lett. , vol.3 , pp. 1-15
    • Lee, C.Y.1    Lee, G.B.2
  • 3
    • 0027594743 scopus 로고
    • Fabrication of porous polymeric film for humidity sensing
    • Park C.B., Lee Y.H., and Yi S.B. Fabrication of porous polymeric film for humidity sensing. Sens. Actuators B 13 (1993) 86-88
    • (1993) Sens. Actuators B , vol.13 , pp. 86-88
    • Park, C.B.1    Lee, Y.H.2    Yi, S.B.3
  • 4
    • 0041438185 scopus 로고    scopus 로고
    • A novel thick-film ceramic humidity sensor
    • Qu W.M., and Meyer J.U. A novel thick-film ceramic humidity sensor. Sens. Actuators B 40 (1997) 175-182
    • (1997) Sens. Actuators B , vol.40 , pp. 175-182
    • Qu, W.M.1    Meyer, J.U.2
  • 6
    • 0025571872 scopus 로고
    • Electrostatic properties of UV-irradiated and surface-grafted polymers
    • Uyama Y., and Ikada Y. Electrostatic properties of UV-irradiated and surface-grafted polymers. J. Appl. Polym. Sci. 41 (1990) 619-629
    • (1990) J. Appl. Polym. Sci. , vol.41 , pp. 619-629
    • Uyama, Y.1    Ikada, Y.2
  • 7
    • 2342507632 scopus 로고    scopus 로고
    • Fabrication of three-dimensionally ordered microporous membrane by wet phase separation
    • Taketani Y., Nagaoka S., and Kawakami H. Fabrication of three-dimensionally ordered microporous membrane by wet phase separation. J. Appl. Polym. Sci. 92 (2004) 3016-3021
    • (2004) J. Appl. Polym. Sci. , vol.92 , pp. 3016-3021
    • Taketani, Y.1    Nagaoka, S.2    Kawakami, H.3
  • 8
    • 17444394410 scopus 로고    scopus 로고
    • Insights into the mechanism of molecular imprinting by immersion precipitation phase inversion of polymer blends via a detailed morphology analysis of porous membranes
    • Ulbricht M., and Malaisamy R. Insights into the mechanism of molecular imprinting by immersion precipitation phase inversion of polymer blends via a detailed morphology analysis of porous membranes. J. Mater. Chem. 15 (2005) 1487-1497
    • (2005) J. Mater. Chem. , vol.15 , pp. 1487-1497
    • Ulbricht, M.1    Malaisamy, R.2
  • 9
    • 0035877215 scopus 로고    scopus 로고
    • Phase behavior and mechanism of membrane formation for polyimide/DMSO/water system
    • Kim J.H., Min B.R., Won J., Park H.C., and Kang Y.S. Phase behavior and mechanism of membrane formation for polyimide/DMSO/water system. J. Membr. Sci. 187 (2001) 47-55
    • (2001) J. Membr. Sci. , vol.187 , pp. 47-55
    • Kim, J.H.1    Min, B.R.2    Won, J.3    Park, H.C.4    Kang, Y.S.5
  • 10
    • 30344455349 scopus 로고    scopus 로고
    • Fabrication of microporous thermoplastic polyurethane for use as small-diameter vascular graft material. I. Phase-inversion method
    • Khorasani M.T., and Shorgashti S. Fabrication of microporous thermoplastic polyurethane for use as small-diameter vascular graft material. I. Phase-inversion method. J. Biomed. Mater. Res. B 76 (2006) 41-48
    • (2006) J. Biomed. Mater. Res. B , vol.76 , pp. 41-48
    • Khorasani, M.T.1    Shorgashti, S.2
  • 11
    • 0032156565 scopus 로고    scopus 로고
    • Stability and reliability of capacitive-type relative humidity sensors using crosslinked polyimide films
    • Matsuguch M., Kuroiwa T., Miyagishi T., Suzuki S., Ogura T., and Sakai Y. Stability and reliability of capacitive-type relative humidity sensors using crosslinked polyimide films. Sens. Actuators B 52 (1998) 53-57
    • (1998) Sens. Actuators B , vol.52 , pp. 53-57
    • Matsuguch, M.1    Kuroiwa, T.2    Miyagishi, T.3    Suzuki, S.4    Ogura, T.5    Sakai, Y.6
  • 13
    • 0026207698 scopus 로고
    • Humidity sensing properties and electrical permittivity of new photosensitive polyimides
    • Boltshauser T., Chandran L., Baltes H., Bose F., and Steiner D. Humidity sensing properties and electrical permittivity of new photosensitive polyimides. Sens. Actuators B 5 (1991) 161-164
    • (1991) Sens. Actuators B , vol.5 , pp. 161-164
    • Boltshauser, T.1    Chandran, L.2    Baltes, H.3    Bose, F.4    Steiner, D.5
  • 14
    • 0022091835 scopus 로고
    • A polyimide-based capacitive humidity sensor
    • Schubert P.J., and Nevin J.H. A polyimide-based capacitive humidity sensor. IEEE Trans. Electron. Dev. 32 (1985) 1220-1223
    • (1985) IEEE Trans. Electron. Dev. , vol.32 , pp. 1220-1223
    • Schubert, P.J.1    Nevin, J.H.2
  • 15
    • 56049099126 scopus 로고    scopus 로고
    • Polyimide humidity integrated sensor fabricated using the MEMS process
    • Wen D.Z. Polyimide humidity integrated sensor fabricated using the MEMS process. Rare Metal. Mater. Eng. 35 (2006) 361-362
    • (2006) Rare Metal. Mater. Eng. , vol.35 , pp. 361-362
    • Wen, D.Z.1
  • 16
    • 0035369453 scopus 로고    scopus 로고
    • A high-sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackages
    • Dokmeci M., and Najafi K. A high-sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackages. J. Microelectromech. Syst. 10 (2001) 197-204
    • (2001) J. Microelectromech. Syst. , vol.10 , pp. 197-204
    • Dokmeci, M.1    Najafi, K.2
  • 17
    • 31844433075 scopus 로고    scopus 로고
    • Humidity sensor based on PMMA simultaneously doped with two different salts
    • Su P.G., Sun Y.L., and Lin C.C. Humidity sensor based on PMMA simultaneously doped with two different salts. Sens. Actuators B 113 (2006) 883-886
    • (2006) Sens. Actuators B , vol.113 , pp. 883-886
    • Su, P.G.1    Sun, Y.L.2    Lin, C.C.3
  • 18
    • 2342590674 scopus 로고    scopus 로고
    • 2 and poly(2-acrylamido-2-methylpropane sulfonate)
    • 2 and poly(2-acrylamido-2-methylpropane sulfonate). Sens. Actuators B 100 (2004) 417-422
    • (2004) Sens. Actuators B , vol.100 , pp. 417-422
    • Su, P.G.1    Tsai, W.Y.2
  • 19
    • 36048963351 scopus 로고    scopus 로고
    • Nanoporous polymeric transmission gratings for high-speed humidity sensing
    • Shi J.J., Hsiao V.K.S., and Huang T.J. Nanoporous polymeric transmission gratings for high-speed humidity sensing. Nanotechnology 18 (2007) 465-501
    • (2007) Nanotechnology , vol.18 , pp. 465-501
    • Shi, J.J.1    Hsiao, V.K.S.2    Huang, T.J.3
  • 20
    • 85007958755 scopus 로고
    • A humidity sensor composed of porous polymer film impregnated with a hydrophilic polymer
    • Sakai Y., Sadaoka Y., Okumura S., and Ikeuchi K. A humidity sensor composed of porous polymer film impregnated with a hydrophilic polymer. Kobunshi Ronbunshu 41 (1984) 209-214
    • (1984) Kobunshi Ronbunshu , vol.41 , pp. 209-214
    • Sakai, Y.1    Sadaoka, Y.2    Okumura, S.3    Ikeuchi, K.4
  • 21
    • 0030241714 scopus 로고    scopus 로고
    • Preparation of newly asymmetric polyimide membranes by phase inversion
    • Jeon J.Y., and Tak T.M. Preparation of newly asymmetric polyimide membranes by phase inversion. J. Appl. Polym. Sci. 61 (1996) 2345-2354
    • (1996) J. Appl. Polym. Sci. , vol.61 , pp. 2345-2354
    • Jeon, J.Y.1    Tak, T.M.2
  • 22
    • 0036568642 scopus 로고    scopus 로고
    • Membrane formation mechanism and permeation properties of a novel porous polyimide membrane
    • Shimizu H., Kawakami H., and Nagaoka S. Membrane formation mechanism and permeation properties of a novel porous polyimide membrane. Polym. Adv. Technol. 13 (2002) 370-380
    • (2002) Polym. Adv. Technol. , vol.13 , pp. 370-380
    • Shimizu, H.1    Kawakami, H.2    Nagaoka, S.3
  • 23
    • 38949109656 scopus 로고    scopus 로고
    • Sensitivity enhancement of capacitive-type photoresistor-based humidity sensors using deliquescent salt diffusion method
    • Lin C.H., and Chen C.H. Sensitivity enhancement of capacitive-type photoresistor-based humidity sensors using deliquescent salt diffusion method. Sens. Actuators B 129 (2008) 531-537
    • (2008) Sens. Actuators B , vol.129 , pp. 531-537
    • Lin, C.H.1    Chen, C.H.2
  • 24
    • 0002348760 scopus 로고
    • Relative humidity-temperature relationship of some saturated salt solutions in the temperature range 0° to 50 °C
    • Wexler A., and Hasegawa S. Relative humidity-temperature relationship of some saturated salt solutions in the temperature range 0° to 50 °C. J. Res. NBS 53 (1954) 19-24
    • (1954) J. Res. NBS , vol.53 , pp. 19-24
    • Wexler, A.1    Hasegawa, S.2
  • 25
    • 56049099618 scopus 로고    scopus 로고
    • IUPAC Compendium of Chemical Terminology, 2nd edition, IUPAC, 1997.
    • IUPAC Compendium of Chemical Terminology, 2nd edition, IUPAC, 1997.
  • 26
    • 84987451289 scopus 로고
    • Vapor-liquid equilibrium data for system: ethanol-water saturated with potassium acetate
    • Meranda D., and Furter W.F. Vapor-liquid equilibrium data for system: ethanol-water saturated with potassium acetate. Can. J. Chem. Eng. 44 (1966) 298-300
    • (1966) Can. J. Chem. Eng. , vol.44 , pp. 298-300
    • Meranda, D.1    Furter, W.F.2
  • 27
    • 33744915767 scopus 로고    scopus 로고
    • Formation of porous poly(vinylidene fluoride) membranes with symmetric or asymmetric morphology by immersion precipitation in the water/TEP/PVDF system
    • Lin D.J., Chang H.H., Chen T.C., Lee Y.C., and Cheng L.P. Formation of porous poly(vinylidene fluoride) membranes with symmetric or asymmetric morphology by immersion precipitation in the water/TEP/PVDF system. Eur. Polym. J. 42 (2006) 1581-1594
    • (2006) Eur. Polym. J. , vol.42 , pp. 1581-1594
    • Lin, D.J.1    Chang, H.H.2    Chen, T.C.3    Lee, Y.C.4    Cheng, L.P.5
  • 28
    • 33751154833 scopus 로고
    • Surface-tension of alcohol plus water from 20 °C to 50 °C
    • Vazquez G., Alvarez E., and Navaza J.M. Surface-tension of alcohol plus water from 20 °C to 50 °C. J. Chem. Eng. Data 40 (1995) 611-614
    • (1995) J. Chem. Eng. Data , vol.40 , pp. 611-614
    • Vazquez, G.1    Alvarez, E.2    Navaza, J.M.3
  • 29
    • 1642478024 scopus 로고    scopus 로고
    • Effect of the doping level on the conductance of polymer-salts complexes in the presence of humidity
    • Casalbore-Miceli G., Yang M.J., Li Y., Camaioni N., Martelli A., and Zanelli A. Effect of the doping level on the conductance of polymer-salts complexes in the presence of humidity. Sens. Actuators B 97 (2004) 362-368
    • (2004) Sens. Actuators B , vol.97 , pp. 362-368
    • Casalbore-Miceli, G.1    Yang, M.J.2    Li, Y.3    Camaioni, N.4    Martelli, A.5    Zanelli, A.6
  • 30
    • 0034275014 scopus 로고    scopus 로고
    • Phase transitions of aqueous atmospheric particles
    • Martin S.T. Phase transitions of aqueous atmospheric particles. Chem. Rev. 100 (2000) 3403-3453
    • (2000) Chem. Rev. , vol.100 , pp. 3403-3453
    • Martin, S.T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.