Effect of heater geometry on the high temperature distribution on a MEMS micro-hotplate

Proceedings of the 3rd Asia Symposium on Quality Electronic Design, ASQED 2011

Volumn , Issue , 2011, Pages 100-104

  Sidek, O ^a   Ishak, M Z ^a   Khalid, M A ^a   Abu Bakar, M Z ^a   Miskam, M A ^a  

^a SCHOOL OF CHEMICAL ENGINEERING   (Malaysia)

Author keywords

finite element analysis; gas sensor; heat distribution; MEMS; micro heater; Micro hotplate

Indexed keywords

CURRENT DISTRIBUTION; ELECTRICAL POTENTIAL; GAS SENSOR; HEAT DISTRIBUTION; HEATER GEOMETRY; MICRO HOTPLATE; MICROHEATER; TEMPERATURE UNIFORMITY;

CHEMICAL SENSORS; FINITE ELEMENT METHOD; GAS DETECTORS; HEATING EQUIPMENT; MEMS; TEMPERATURE DISTRIBUTION;

GEOMETRY;

EID: 84855879390     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASQED.2011.6111709     Document Type: Conference Paper

References (9)

1. rd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems, Sanya, China, January 6-9, 2008, pp. 284-287.
2. J. Courbat, D. Briand and N.F. de Rooij, "Reliability improvement of suspended platinum-based microheating elements", Sensors and Actuators A, vol. 142, 2008, pp. 284-291. (Pubitemid 351199568)
3. G.S. Chung and J.M. Jeong, "Fabrication of micro heaters on polycrystalline 3C-SiC suspended membranes for gas sensors and their characteristics", Microelectronic Engineering, vol. 87, 2010, pp. 2348-2352.
4. J. Jakovenko, M. Musak, T. Lalinskytfh, M. Drzik and G. Vanko "Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensor", Proceedings of the Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP2007, Stresa, Italy, April 25-27, 2007.
5. th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, pp. 73-76.
6. J.O. Dennis, A. Yousif and M.N Mohamad, "Design, Simulation and Modeling of a Micromachined High Temperature Microhotplate for Application in Trace Gas Detection", Int. Journal of Engineering & Technology IJET-IJENS, vol. 10, 2010, pp. 89-96.
7. G. Velmathi, N. Ramshanker and S. Mohan, "2D Simulations and Electro-Thermal Analysis of Micro- Heater Designs Using COMSOL™ for Gas Sensor Applications", Proceedings of the COMSOL Conference 2010, Bangalore, India, October 29-30, 2010.
8. O. Grudin, R. Marinescu, L. Landsberger, D. Cheeke and M. Kahrizi, "Microstructure Release and Test Techniques for High-temperature Micro Hotplate", Proceedings of the IEEE Canadian Conference on Electrical and Computer Engineering, May 12, 1999, pp. 1610-1615.
9. M. Ehmann, P. Ruther, M. von Arx and O. Paul, "Operation and short-term drift of polysilicon-heated CMOS microstructures at temperature up to 1200 K", Journal of Micromechanics and Microengineering, vol. 11, 2001, pp. 397-401. (Pubitemid 32660140)