Study on the MEMS-type gas sensor for detecting a nitrogen oxide gas

Solid State Ionics

Volumn 192, Issue 1, 2011, Pages 668-671

  Yoon, Jin Ho ^a   Kim, Jung Sik ^a  

^a University of Seoul   (South Korea)

Author keywords

Gas sensor; MEMS; NOx; Tin oxide; Tungsten oxide

Indexed keywords

AIR QUALITY SYSTEMS; GAS CONCENTRATION; HIGH EFFICIENCY; INDOOR ATMOSPHERE; LOW-POWER CONSUMPTION; MEMS PLATFORM; MEMS TECHNOLOGY; MICRO-GAS SENSORS; MICROHEATER; OPERATING TEMPERATURE; RELATIVE RESISTANCE; SENSING FILMS; THERMAL EFFICIENCY; TUNGSTEN OXIDE; XRD PATTERNS;

AIR QUALITY; CHEMICAL SENSORS; FINITE ELEMENT METHOD; GAS DETECTORS; GASES; HEATING EQUIPMENT; MICROELECTROMECHANICAL DEVICES; NITRIC OXIDE; NITROGEN OXIDES; SOL-GEL PROCESS; SOLS; TIN; TIN OXIDES; TOPOGRAPHY; TUNGSTEN; TUNGSTEN COMPOUNDS;

NITROGEN;

EID: 79958804914     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssi.2010.09.049     Document Type: Conference Paper

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