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Volumn 6, Issue 21, 2014, Pages 12391-12396

300 mm Wafer-level, ultra-dense arrays of Au-capped nanopillars with sub-10 nm gaps as reliable SERS substrates

(10) Li, Jiaqi a,b Chen, Chang a,b Jans, Hilde a Xu, Xiumei a Verellen, Niels a,b Vos, Ingrid a Okumura, Yasuaki a,c Moshchalkov, Victor V b Lagae, Liesbet a,b Van Dorpe, Pol a,b

a IMEC (Belgium)

b UNIVERSITY OF LEUVEN (Belgium)

c PANASONIC CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD METALLOGRAPHY; LITHOGRAPHY; NANOPILLARS; RAMAN SPECTROSCOPY; SILICON WAFERS; URANIUM METALLOGRAPHY; VANADIUM METALLOGRAPHY;

ARRAY DENSITIES; COMMERCIAL PRODUCTS; IMMERSION LITHOGRAPHY; MOLECULE DETECTION; REPRODUCIBILITIES; SI NANOPILLARS; SIGNAL INTENSITIES; SURFACE ENHANCED RAMAN SPECTROSCOPY;

SUBSTRATES;

EID: 84907964720 PISSN: 20403364 EISSN: 20403372 Source Type: Journal
DOI: 10.1039/c4nr04315d Document Type: Article

Times cited : (63)

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