High-throughput ionic liquid ion sources using arrays of microfabricated electrospray emitters with integrated extractor grid and carbon nanotube flow control structures

Journal of Microelectromechanical Systems

Volumn 23, Issue 5, 2014, Pages 1237-1248

  Hill, Frances Ann ^a,b   Heubel, Eric Vincent ^a   De Leon, Philip Ponce ^a   Velasquez Garcia, Luis Fernando ^a  

^a Massachusetts Institute of Technology   (United States)

^b KLA TENCOR CORPORATION   (United States)

Author keywords

carbon nanotubes.; Electrospray; ionic liquid; MEMS; microfabrication; multiplexing

Indexed keywords

IONIC LIQUIDS; MEMS; MICROFABRICATION; MULTIPLEXING;

CONTROL STRUCTURE; ELECTROSPRAY EMITTER; ELECTROSPRAYS; HIGH-THROUGHPUT; IONIC LIQUID ION SOURCES; MICROFABRICATED;

CARBON NANOTUBES;

EID: 84907933251     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2014.2320509     Document Type: Article

References (38)

1. G. I. Taylor, "Disintegration of water drops in an electric field," Proc. Roy. Soc. London A, vol. 280, no. 1382, pp. 383-397, 1964.
2. W. Deng, J. F. Klemic, X. Li, M. A. Reed, and A. Gomez, "Increase of electrospray throughput using multiplexed microfabricated sources for the scalable generation of monodisperse droplets," J. Aerosol Sci., vol. 37, no. 6, pp. 696-714, 2006.
3. I. Romero-Sanz, R. Bocanegra, J. Fernandez de la Mora, and M. Gamero-Castaño, "Source of heavy molecular ions based on Taylor cones of ionic liquids operating in the pure ion evaporation regime," J. Appl. Phys., vol. 94, no. 5, pp. 3599-3605, 2003.
4. L. F. Velásquez-García, A. I. Akinwande, and M. Martinez-Sanchez, "A planar array of micro-fabricated electrospray emitters for thruster applications," J. Microelectromech. Syst., vol. 15, no. 5, pp. 1272-1280, 2006.
5. R. Krpoun, K. L. Smith, J. P. W. Stark, and H. R. Shea, "Tailoring the hydraulic impedance of out-of-plane micromachined electrospray sources with integrated electrodes," Appl. Phys. Lett., vol. 94, no. 16, pp. 163502-1-163502-3, 2009.
6. R. S. Legge and P. C. Lozano, "Electrospray propulsion based on emitters microfabricated in porous metals," J. Propuls. Power, vol. 27, no. 2, pp. 485-495, 2011.
7. B. Gassend, L. F. Velásquez-García, A. I. Akinwande, and M. Martinez-Sanchez, "A fully microfabricated externally wetted electrospray thruster," in Proc. 43rd AIAA/ASME/SAE/ASEE Joint Propuls. Conf. Exhibit, Cincinnati, OH, USA, Jul. 2007, no. AIAA 2007-5182, p. 8.
8. J. Mueller, R. Hofer, and J. Ziemer, "Survey of propulsion technologies applicable to cubesats," in Proc. JANNAF Propuls. Meet., Colorado Springs, CO, USA, May 2010.
9. D. G. Courtney, H. Q. Li, and P. Lozano, "Emission measurements from planar arrays of porous ionic liquid ion sources," J. Phys. Appl. Phys., vol. 45, no. 48, p. 485203, 2012.
10. P. D. Prewett and G. L. R. Mair, Focused Ion Beams From Liquid Metal Ion Sources. Hoboken, NJ, USA: Wiley, 1991.
11. A. Jaworek, "Electrospray droplet sources for thin film deposition," J. Mater. Sci., vol. 42, no. 1, pp. 266-297, 2006.
12. W. Deng, C. M. Waits, and A. Gomez, "Digital electrospray for controlled deposition," Rev. Sci. Instrum., vol. 81, no. 3, pp. 035114-1-035114-6, 2010.
13. B. Gassend, L. F. Velásquez-García, A. I. Akinwande, and M. Martinez-Sanchez, "A microfabricated planar electrospray array ionic liquid ion source with integrated extractor," J. Microelectromech. Syst., vol. 18, no. 3, pp. 679-694, 2009.
14. L. F. Velásquez-García, A. I. Akinwande, and M. Martinez-Sanchez, "A micro-fabricated linear array of electrospray emitters for thruster applications," J. Microelectromech. Syst., vol. 15, no. 5, pp. 1260-1271, 2006.
15. R. Krpoun and H. Shea, "A method to determine the onset voltage of single and arrays of electrospray emitters," J. Appl. Phys., vol. 104, no. 6, pp. 064511-1-064511-8, 2008.
16. H. Q. Li, D. G. Courtney, P. D. G. Maqueo, and P. Lozano, "Fabrication and testing of an ionic electrospray propulsion system with a porous metal tip array," in Proc. 16th IEEE Int. Conf. Solid-State Sens., Actuators, Microsyst. Conf., Beijing, China, Jun. 2011, pp. 1998-2001.
17. Y.-X. Wang, J. W. Cooper, C. S. Lee, and D. L. DeVoe, "Efficient electrospray ionization from polymer microchannels using integrated hydrophobic membranes," Lab Chip, vol. 4, no. 4, pp. 363-367, 2004.
18. J. F. De La Mora and I. G. Loscertales, "The current emitted by highly conducting Taylor cones," J. Fluid Mech., vol. 260, pp. 155-184, Feb. 1994.
19. D. Garoz et al., "Taylor cones of ionic liquids from capillary tubes as sources of pure ions: The role of surface tension and electrical conductivity," J. Appl. Phys., vol. 102, no. 6, pp. 064913-1-064913-10, 2007.
20. I. Guerrero, R. Bocanegra, F. J. Higuera, and J. Fernandez de la Mora, "Ion evaporation from Taylor cones of propylene carbonate mixed with ionic liquids," J. Fluid Mech., vol. 591, pp. 437-459, Nov. 2007.
21. P. Lozano, and M. Martínez-Sánchez, "Ionic liquid ion sources: Characterization of externally wetted emitters," J. Colloid Interf. Sci., vol. 282, no. 2, pp. 415-421, 2005.
22. R. Krpoun and H. R. Shea, "Integrated out-of-plane nanoelectrospray thruster arrays for spacecraft propulsion," J. Micromech. Microeng., vol. 19, no. 4, p. 045019, 2009.
23. S. Castro, C. Larriba, J. Fernandez de la Mora, P. Lozano, Y. Yoshida, and G. Saito, "Effect of liquid properties on electrosprays from externally wetted ionic liquid ion sources," J. Appl. Phys., vol. 102, no. 9, pp. 094310-1-094310-5, 2007.
24. H. Jansen, "The black silicon method: A universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control," J. Micromech. Microeng., vol. 5, no. 2, pp. 115-120, Jun. 1995.
25. M. Meyyappan, L. Delzeit, A. Cassell, and D. Hash, "Carbon nanotube growth by PECVD: A review," Plasma Sour. Sci. Technol., vol. 12, no. 2, pp. 205-216, 2003.
26. M. Chhowalla et al., "Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition," J. Appl. Phys., vol. 90, no. 10, pp. 5308-5317, 2001.
27. F. A. Hill, P. J. Ponce de Leon, and L. F. Velásquez-García, "Highthroughput ionic liquid electrospray sources based on dense monolithic arrays of emitters with integrated extractor grid and carbon nanotube flow control structures," in Proc. 17th IEEE Int. Conf. Solid-State Sens., Actuators, Microsyst., Barcelona, Spain, Jun. 2013, pp. 2644-2647.
28. L. F. Velásquez-García, A. I. Akinwande, and M. Martinez-Sanchez, "Precision hand assembly of MEMS subsystems using DRIE-patterned deflection spring structures: An example of an out-of-plane substrate assembly," J. Microelectromech. Syst., vol. 16, no. 3, pp. 598-612, 2007.
29. B. Gassend, L. F. Velásquez-García, and A. I. Akinwande, "Precision in-plane hand assembly of bulk-microfabricated components for highvoltage MEMS arrays applications," J. Microelectromech. Syst., vol. 8, no. 2, pp. 332-346, 2009.
30. N. Roxhed, P. Griss, and G. Stemme, "Tapered deep reactive ion etching: Method and characterization," in Proc. 14th IEEE Int. Conf. Solid-State Sens., Actuators, Microsyst., Lyon, France, Jun. 2007, pp. 493-496.
31. B. Gassend, L. F. Velásquez-García, and A. I. Akinwande, "Design and fabrication of DRIE-patterned complex needle-like structures," J. Microelectromech. Syst., vol. 19, no. 3, pp. 589-598, 2010.
32. K. B. K. Teo et al., "Uniform patterned growth of carbon nanotubes without surface carbon," Appl. Phys. Lett., vol. 79, no. 10, pp. 1534-1536, 2001.
33. F. A. Hill, P. J. Ponce de Leon, and L. F. Velásquez-García, "Wetting properties of carbon nanotube forests grown using plasma enhanced chemical vapor deposition on planar and non-planar substrates," in preparation.
34. S. Hussain, R. Amade, E. Jover, and E. Bertran, "Functionalization of carbon nanotubes by water plasma," Nanotechnology, vol. 23, no. 38, p. 385604, 2012.
35. A. Tamayol and M. Bahrami, "Transverse permeability of fibrous porous media," Phys. Rev., vol. 83, no. 4, pp. 046314-1-046314-8, 2011.
36. K. J. Terhune and L. B. King, "Ion and droplet mass measurements of an electrospray emitter using ExB filter," in Proc. 32nd Int. Electr. Propuls. Conf., Wiesbaden, Germany, 2011, no. IEPC-2011-299, pp. 11-15.
37. P. Lozano and M. Martinez-Sanchez, "Efficiency estimation of EMI-BF4 ionic liquid electrospray thrusters," in Proc. 41st AIAA/ASME/SAE/ASEE Joint Propuls. Conf. Exhibit, Tucson, AZ, USA, Jul. 2005, no. AIAA 2005-4388, p. 8.
38. W. Martino, J. Fernandez de la Mora, Y. Yoshida, G. Saito, and J.Wilkes, "Surface tension measurements of highly conducting ionic liquids," Green Chem., vol. 8, no. 4, pp. 390-397, 2006.