Closed-loop tracking of large displacements in electro-thermally actuated VO2-based MEMS

Journal of Microelectromechanical Systems

Volumn 23, Issue 5, 2014, Pages 1073-1083

  Merced, Emmanuelle ^a   Tan, Xiaobo ^a   Sepulveda, Nelson ^a  

^a Michigan State University   (United States)

Author keywords

closed loop control; MEMS; micro actuator; phase transition.; Vanadium dioxide

Indexed keywords

PHASE TRANSITIONS;

CLOSED-LOOP CONTROL; CLOSED-LOOP-TRACKING; LARGE DISPLACEMENTS; VANADIUM DIOXIDE;

MEMS;

EID: 84907932098     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2014.2304694     Document Type: Article

References (28)

1. A. Rúa, F. E. Fernández, and N. Sepúlveda, "Bending in VO2-coated microcantilevers suitable for thermally activated actuators," J. Appl. Phys., vol. 107, no. 7, pp. 0745061-0745064, 2010.
2. E. Merced, X. Tan, and N. Sepúlveda, "Strain energy density of VO2-based microactuators," Sens. Actuators A, Phys., vol. 196, pp. 30-37, Jul. 2013.
3. J. B. Cao, W. Fan, Q. Zhou, E. Sheu, A. W. Liu, C. Barrett, et al., "Colossal thermal-mechanical actuation via phase transition in single-crystal VO2 microcantilevers," J. Appl. Phys., vol. 108, no. 8, pp. 0835381-0835384, 2010.
4. R. Cabrera, E. Merced, and N. Sepúlveda, "Performance of electrothermally driven VO2-based MEMS actuators," J. Microelectromech. Syst., vol. 23, no. 1, pp. 243-251, Feb. 2014.
5. N. Manca, L. Pellegrino, T. Kanki, S. Yamasaki, H. Tanaka, A. S. Siri, et al., "Programmable mechanical resonances in MEMS by localized joule heating of phase change materials," Adv. Mater., vol. 24, no. 44, pp. 6430-6435, Nov. 2013.
6. K. Wang, C. Cheng, E. Cardona, J. Guan, K. Liu, and J. Wu, "Performance limits of microactuation with vanadium dioxide as a solid engine," ACS Nano, vol. 7, no. 3, pp. 2266-2272, 2013.
7. F. J. Morin, "Oxides which show a metal-to-insulator transition at the neel temperature," Phys. Rev. Lett., vol. 3, no. 1, pp. 34-36, 1959.
8. A. S. Barker, H. W. Verleur, and H. J. Guggenheim, "Infrared optical properties of vanadium dioxide above and below the transition temperature," Phys. Rev. Lett., vol. 17, no. 26, pp. 1286-1289, 1966.
9. R. Cabrera, E. Merced, and N. Sepúlveda, "A micro-electro-mechanical memory based on the structural phase transition of VO2," Phys. Status Solidi A, vol. 210, no. 9, pp. 1704-1711, Sep. 2013.
10. N. Dávila, R. Cabrera, and N. Sepúlveda, "Programming and projection of near IR images using VO2 films," IEEE Photon. Technol. Lett., vol. 24, no. 20, pp. 1830-1833, Oct. 15, 2012.
11. V. Eyert, "The metal-insulator transition of VO2: A band theoretical approach," Ann. Phys., vol. 11, no. 9, pp. 650-702, 2002.
12. E. Merced, N. Dávila, D. Torres, R. Cabrera, F. E. Fernández, and N. Sepúlveda, "Photothermal actuation of VO2: Cr-coated microcantilevers in air and aqueous media," Smart Mater. Struct., vol. 21, no. 10, p. 105009, 2012.
13. J. Zhang, E. Merced, N. Sepúlveda, and X. Tan, "Modeling and inverse compensation of nonmonotonic hysteresis in VO2-coated microactuators," IEEE/ASME Trans. Mechatron., 2013, to be published.
14. L. Wu and H. Xie, "A large vertical displacement electrothermal bimorph microactuator with very small lateral shift," Sens. Actuators A, Phys., vols. 145-146, pp. 371-379, Jul./Aug. 2008.
15. Heat Transfer, Electrostatic, and Mechanic Modules, COMSOL Multiphysics, Stockholm, Sweden, 2013.
16. K. Y. Tsai, T. S. Chin, and H. P. D. Shieh, "Effect of grain curvature on nano-indentation measurements of thin films," Jpn. J. Appl. Phys., vol. 43, no. 9A, pp. 6268-6273, 2004.
17. P. Jin, S. Nakao, S. Tanemura, T. Bell, L. S. Wielunski, and M. V. Swain, "Characterization of mechanical properties of VO2 thin films on sapphire and silicon by ultra-microindentation," Thin Solid Films, vols. 343-344, nos. 1-2, pp. 134-137, 1999.
18. J. Luo, Y. Q. Fu, J. A. Williams, and W. Milne, "Thermal degradation of electroplated nickel thermal microactuators," J. Microelectromech. Syst., vol. 18, no. 6, pp. 1279-1287, 2009.
19. X. Tan and J. S. Baras, "Modeling and control of hysteresis in magnetostrictive actuators," Automatica, vol. 40, no. 9, pp. 1469-1480, 2004.
20. A. Janaideh and P. Krejci, "Inverse rate-dependent Prandtl-Ishlinskii model for feedforward compensation of hysteresis in a piezomicropositioning actuator," IEEE/ASME Trans. Mechatron., vol. 18, no. 5, pp. 1498-1507, Oct. 2013.
21. G. Gu and L. Zhu, "Modeling of rate-dependent hysteresis in piezoelectric actuators using a family of ellipses," Sens. Actuators A, Phys., vol. 165, no. 2, pp. 303-309, 2011.
22. S. Timoshenko, Vibration Problems in Engineering, vol. 2, 2nd ed. New York, NY, USA: D. Van Nostrand Company, 1937, p. 86.
23. R. J. Roark, W. C. Young, and R. G. Budynas, Roark's Formulas for Stress and Strain, vol. 7, 7th ed. New York, NY, USA: McGraw-Hill, 2002, p. 138.
24. L. D. Landau and E. M. Lifshits, Fluid Mechanics, vol. 6. Reading, MA, USA: Addison-Wesley, 1959, pp. 88-101.
25. H. Lamb, Hydrodynamics, vol. 6, 6th ed. New York, NY, USA: Dover, 1945, pp. 604-605.
26. A. Esbrook, X. Tan, and H. K. Khalil, "Self-excited limit cycles in an integral-controlled system with backlash," IEEE Trans. Autom. Control, 2013, to be published.
27. A. Cavallo, C. Natale, S. Pirozzi, and C. Visone, "Limit cycles in control systems employing smart actuators with hysteresis," IEEE/ASME Trans. Mechatron., vol. 10, no. 2, pp. 172-180, Apr. 2005.
28. Z. Lai, D. Y. Xue, J.-K. Huang, and C. Mei, "Panel flutter limit-cycle suppression with piezoelectric actuation," J. Intell. Mater. Syst. Struct., vol. 6, no. 2, pp. 274-282, 1995.