A micro-electro-mechanical memory based on the structural phase transition of VO2

Physica Status Solidi (A) Applications and Materials Science

Volumn 210, Issue 9, 2013, Pages 1704-1711

  Cabrera, Rafmag ^a   Merced, Emmanuelle ^a   Sepúlveda, Nelson ^a  

^a Michigan State University   (United States)

Author keywords

MEMS; phase change materials; smart microactuators; vanadium dioxide

Indexed keywords

ELECTROTHERMAL ACTUATION; FLUCTUATING TEMPERATURES; MECHANICAL DISPLACEMENTS; MICRO-ELECTRO-MECHANICAL; STRUCTURAL PHASE TRANSITION; TRANSIENT RESPONSE ANALYSIS; VANADIUM DIOXIDE; VANADIUM DIOXIDE THIN FILMS;

CLOSED LOOP CONTROL SYSTEMS; MEMS; PHASE CHANGE MATERIALS;

VANADIUM;

EID: 84884985570     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.201330021     Document Type: Article

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