Evaluation of ZrO2 gate dielectrics for advanced CMOS devices

European Solid-State Device Research Conference

Volumn , Issue , 2003, Pages 473-476

  Gehring, Andreas ^a   Harasek, Stefan ^b   Bertagnolli, Emmerich ^b   Selberherr, Siegfried ^a  

^a INSTITUTE FOR MICROELECTRONICS   (Austria)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED CMOS DEVICE;

EID: 84907692038     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.2003.1256916     Document Type: Conference Paper

References (9)

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