Superhydrophobic, passive microvalves with controllable opening threshold: Exploiting plasma nanotextured microfluidics for a programmable flow switchboard

Microfluidics and Nanofluidics

Volumn 17, Issue 3, 2014, Pages 489-498

  Ellinas, Kosmas ^a   Tserepi, Angeliki ^a   Gogolides, Evangelos ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

Author keywords

Passive valving; Plasma nanotextured microfluidics; Superhydrophobic microfluidics

Indexed keywords

ELECTRIC SWITCHBOARDS; FLUIDIC DEVICES; HYDROPHOBICITY; MICROCHANNELS; NANOSCIENCE; PLASMA ETCHING;

MICRO-FLUIDIC DEVICES; MICROCHANNEL NETWORK; NANOSCIENCE AND NANOTECHNOLOGIES; NANOTEXTURED; NANOTEXTURED SURFACE; PASSIVE VALVING; STENCIL MASKS; SUPERHYDROPHOBIC;

MICROFLUIDICS;

EID: 84906785072     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-014-1335-9     Document Type: Article

References (39)

1. Accardo A, Gentile F, Mecarini F, De Angelis F, Burghammer M, Di Fabrizio E et al (2010) In situ X-ray scattering studies of protein solution droplets drying on micro- and nano-patterned superhydrophobic PMMA surfaces. Langmuir 26:15057-15064
2. Accardo A, Mecarini F, Leoncini M, Brandi F, Di Cola E, Burghammer M et al (2013) Fast, active droplet interaction: coalescence and reactive mixing controlled by electrowetting on a superhydrophobic surface. Lab Chip 13:332-335
3. Bazargan V, Stoeber B (2010) Flow control using a thermally actuated microfluidic relay valve. J Microelectromech Syst 19:1079-1087
4. Chung BG, Flanagan LA, Rhee SW, Schwartz PH, Lee AP, Monuki ES et al (2005) Human neural stem cell growth and differentiation in a gradient-generating microfluidic device. Lab Chip 5:401-406
5. Constantoudis V, Christoyianni H, Zakka E, Gogolides E (2009) Modeling of roughness evolution during the etching of inhomogeneous films: material-induced anomalous scaling. Phys Rev E Stat Nonlinear Soft Matter Phys 79:1604-1-1604-8
6. Di Mundo R, Palumbo F, d'Agostino R (2010) Influence of chemistry on wetting dynamics of nanotextured hydrophobic surfaces. Langmuir 26:5196-5201
7. Do J, Lee S, Han JY, Kai JH, Hong CC, Gao CA et al (2008) Development of functional lab-on-a-chip on polymer for point-of-care testing of metabolic parameters. Lab Chip 8:2113-2120
8. Gervais L, Delamarche E (2009) Toward one-step point-of-care immunodiagnostics using capillary-driven microfluidics and PDMS substrates. Lab Chip 9:3330
9. Gervais L, de Rooij N, Delamarche E (2011) Microfluidic chips for point-of-care immunodiagnostics. Adv Mater 23:H151-H176
10. Gleiche M, Chi LF, Fuchs H (2000) Nanoscopic channel lattices with controlled anisotropic wetting. Nature 403:173-175
11. Gnanappa AK, Papageorgiou DP, Gogolides E, Tserepi A, Papathanasiou AG, Boudouvis AG (2012) Hierarchical, plasma nanotextured, robust superamphiphobic polymeric surfaces structurally stabilized through a wetting-drying cycle. Plasma Process Polym 9:304-315
12. Goedecke N, McKenna B, El-Difrawy S, Carey L, Matsudaira P, Ehrlich D (2004) A high-performance multilane microdevice system designed for the DNA forensics laboratory. Electrophoresis 25:1678-1686
13. Gogolides E, Boukouras C, Kokkoris G, Brani O, Tserepi A, Constantoudis V (2004) Si etching in high-density SF6 plasmas for microfabrication: surface roughness formation. Microelectron Eng 73-74:312-318
14. Gogolides E, Constantoudis V, Kokkoris G, Kontziampasis D, Tsougeni K, Boulousis G et al (2011) Controlling roughness: from etching to nanotexturing and plasma-directed organization on organic and inorganic materials. J Phys D Appl Phys 44:174021
15. Handique K, Burke DT, Mastrangelo CH, Burns MA (2000) Nanoliter liquid metering in microchannels using hydrophobic patterns. Anal Chem 72:4100-4109
16. Kokkoris G, Constantoudis V, Angelikopoulos P, Boulousis G, Gogolides E (2007) Dual nanoscale roughness on plasma-etched Si surfaces: role of etch inhibitors. Phys Rev B Condens Matter Mater Phys 76:193405-1-193405-4
17. Laser DJ, Santiago JG (2004) A review of micropumps. J Micromech Microeng 14:R35-R64
18. Li PCH, Harrison DJ (1997) Transport, manipulation, and reaction of biological cells on-chip using electrokinetic effects. Anal Chem 69:1564-1568
19. Lu C, Xie Y, Yang Y, Cheng MMC, Koh C-G, Bai Y et al (2006) New valve and bonding designs for microfluidic biochips containing proteins. Anal Chem 79:994-1001
20. Man FP, Mastrangelo CH, Burns MA, Burke DT (1998) Microfabricated capillarity-driven stop valve and sample injector. In: IEEE Proceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems
21. Manz A, Graber N, Widmer HM (1990) Miniaturized total chemical-analysis systems - a novel concept for chemical sensing. Sens Actuators B Chem 1:244-248
22. Marquez-Velasco J, Vlachopoulou ME, Tserepi A, Gogolides E (2010) Stable superhydrophobic surfaces induced by dual-scale topography on SU-8. Microelectron Eng 87:782-785
23. Nguyen NT, Wu ZG (2005) Micromixers - a review. J Micromech Microeng 15:R1-R16
24. Papageorgiou DP, Tsougeni K, Tserepi A, Gogolides E (2012) Superhydrophobic, hierarchical, plasma-nanotextured polymeric microchannels sustaining high-pressure flows. Microfluid Nanofluidics 14:247-255
25. Suk JW, Cho JH (2007) Capillary flow control using hydrophobic patterns. J Micromech Microeng 17:N11-N15
26. Tserepi A, Gogolidis E, Misiakos K, Vlachopoulou M-E, Vourdas N (2006) Method for the fabrication of high surface area ratio and high aspect ratio surfaces on substrates. PCT/GR2006/000011
27. Tsougeni K, Vourdas N, Tserepi A, Gogolides E, Cardinaud C (2009) Mechanisms of oxygen plasma nanotexturing of organic polymer surfaces: from stable super hydrophilic to super hydrophobic surfaces. Langmuir 25:11748-11759
28. Tsougeni K, Papageorgiou D, Tserepi A, Gogolides E (2010a) "Smart" polymeric microfluidics fabricated by plasma processing: controlled wetting, capillary filling and hydrophobic valving. Lab Chip 10:462-469
29. Tsougeni K, Tserepi A, Constantoudis V, Gogolides E, Petrou PS, Kakabakos SE (2010b) Plasma nanotextured PMMA surfaces for protein arrays: increased protein binding and enhanced detection sensitivity. Langmuir 26:13883-13891
30. Tsougeni K, Koukouvinos G, Petrou PS, Tserepi A, Kakabakos SE, Gogolides E (2012a) High-capacity and high-intensity DNA microarray spots using oxygen-plasma nanotextured polystyrene slides. Anal Bioanal Chem 403:2757-2764
31. Tsougeni K, Petrou PS, Papageorgiou DP, Kakabakos SE, Tserepi A, Gogolides E (2012b) Controlled protein adsorption on microfluidic channels with engineered roughness and wettability. Sens Actuators B Chem 161:216-222
32. Vlachopoulou ME, Petrou PS, Kakabakos SE, Tserepi A, Beltsios K, Gogolides E (2009) Effect of surface nanostructuring of PDMS on wetting properties, hydrophobic recovery and protein adsorption. Microelectron Eng 86:1321-1324
33. Vourdas N, Tserepi A, Gogolides E (2007) Nanotextured super-hydrophobic transparent poly(methyl methacrylate) surfaces using high-density plasma processing. Nanotechnology 18:125304
34. Vourdas N, Tserepi A, Boudouvis AG, Gogolides E (2008) Plasma processing for polymeric microfluidics fabrication and surface modification: effect of super-hydrophobic walls on electroosmotic flow. Microelectron Eng 85:1124-1127
35. Vourdas N, Kontziampasis D, Kokkoris G, Constantoudis V, Goodyear A, Tserepi A et al (2010) Plasma directed assembly and organization: bottom-up nanopatterning using top-down technology. Nanotechnology 21:085302
36. Woias P (2005) Micropumps - past, progress and future prospects. Sens Actuators B Chem 105:28-38
37. Zakka E, Constantoudis V, Gogolides E (2007) Roughness formation during plasma etching of composite materials: a kinetic Monte Carlo approach. IEEE Trans Plasma Sci 35:1359-1369
38. Zimmermann M, Schmid H, Hunziker P, Delamarche E (2007) Capillary pumps for autonomous capillary systems. Lab Chip 7:119
39. Zimmermann M, Hunziker P, Delamarche E (2008) Valves for autonomous capillary systems. Microfluid Nanofluidics 5:395-402