Self-purification model for metal-assisted chemical etching of metallurgical silicon

Electrochimica Acta

Volumn 138, Issue , 2014, Pages 476-480

  Li, Xiaopeng ^a,b   Xiao, Yanjun ^c   Yan, Chenglin ^d   Zhou, Keya ^c   Miclea, Paul Tiberiu ^b,e   Meyer, Sylke ^e   Schweizer, Stefan L ^b   Sprafke, Alexander ^b   Lee, Jung Ho ^c   Wehrspohn, Ralf B ^b,f  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^b MARTIN LUTHER UNIVERSITY HALLE WITTENBERG   (Germany)

^c Hanyang University   (South Korea)

^d SOOCHOW UNIVERSITY   (China)

^e FRAUNHOFER CENTER FOR SILICON PHOTOVOLTAICS CSP   (Germany)

^f FRAUNHOFER INSTITUTE FOR MECHANICS OF MATERIALS IWM   (Germany)

Author keywords

etching model; Metal assisted chemical etching; metallurgical silicon; purification effect; transitional metal impurity

Indexed keywords

ETCHING; IMPURITIES; METAL IONS; METALLURGY; NANOWIRES; POROUS SILICON; PURIFICATION; SILICON;

CHEMICAL REDUCTION; DISSOLVED METAL IONS; METAL-ASSISTED CHEMICAL ETCHING; METALLURGICAL-GRADE SILICON; POROUS SILICON NANOWIRES; PURIFICATION EFFECT; SELF-PURIFICATION; TRANSITIONAL METALS;

METALS;

EID: 84905010904     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2014.05.048     Document Type: Article

References (28)

1. A.I. Hochbaum, and P. Yang Chem. Rev. 110 2010 527
2. J.K. Hyun, S. Zhang, and L. Lauhon J. Annu. Rev. Mater. Res 43 2013 21.1
3. E.C. Garnett, M.L. Brongersma, Y. Cui, and M.D. McGehee Annu. Rev. Mater. Res. 41 2011 269
4. R. Yan, D. Gargas, and P. Yang Nature Photonics 3 2009 569 576
5. C.-S. Guo, L.-D. Luo, G.-D. Yuan, X.-B. Yang, R.-Q. Zhang, W.-J. Zhang, and S.-T. Lee Angew. Chem. Int. Ed. 48 2009 9896
6. X. Li Curr. Opin. Solid State Mater. Sci. 16 2012 71
7. H.-D. Um, S.A. Moiz, K.-T. Park, J.-Y. Jung, S.-W. Jee, C.H. Ahn, D.C. Kim, H.K. Cho, D.-W. Kim, and J.-H. Lee Appl. Phys. Lett 98 2011 033102:1
8. G. Zheng, F. Patolsky, Y. Cui, W.U. Wang, and C.M. Liber Nature Biotech. 23 2005 1294
9. A.I. Hochbaum, R. Chen, R.D. Delgado, W. Liang, E.C. Garnett, M. Najarian, A. Majumdar, and P. Yang Nature 451 2008 163
10. S. Brittman, H. Gao, E.C. Garnett, and P. Yang Nano Lett. 11 2011 5189
11. M. Ge, J. Rong, X. Fang, and C. Zhou Nano Lett. 12 2012 2318
12. J.M. Weisse, A.M. Marconnet, D.R. Kim, P.M. Rao, M.A. Panzer, K.E. Goodson, and X. Zheng Nanoscale Res. Lett. 7 2012 554
13. X. Li, and P.W. Bohn Appl. Phys. Lett. 77 2000 2572
14. K.-Q. Peng, Y. Wu, H. Fang, X. Zhong, Y. Xu, and J. Zhu Angew. Chem. Int. Ed. 44 2005 2737
15. Z. Huang, N. Geyer, P. Werner, J.d. Boor, and U. Gösele Adv. Mater. 23 2011 285
16. Y. Qu, L. Liao, Y. Li, H. Zhang, Y. Huang, and X. Duan Nano Lett. 9 2009 4539
17. X. Zhong, Y. Qu, Y.C. Lin, L. Liao, and X. Duan ACS Appl. Mater. Interfaces 3 2011 261
18. X. Li, Y. Xiao, J.H. Bang, D. Lausch, S. Meyer, P.-T. Miclea, J.-Y. Jung, S.L. Schweizer, J.-H. Lee, and R.B. Wehrspohn Adv. Mater. 25 2013 3187
19. J. Dietl Solar Cells 10 1983 145
20. A. Luque, and S. Hegedus Handbook of photovoltaic science and engineering 2nd edition 2011 Wiley-VCH Weinheim
21. X. Ma, J. Zhang, T. Wang, and T. Li Rare Metals 28 2009 221
22. S.A. McHugo, A.C. Thompson, I. Perichaud, and S. Martinuzzi Appl. Phys. Lett. 72 1998 3482
23. D. R. Lide, ed. CRC Handbook of Chemistry and Physics (87th ed.), 2006.
24. Y.H. Ogata, K. Kobayashi, and M. Motoyama Curr. Opin. Solid State Mater. Sci. 10 2006 163 172
25. K.W. Kolasinski, and W.B. Barclay Angew. Chem. Int. Ed 52 2013 6731
26. K.W. Kolasinski, J.W. Gogola, and W.B. Barclay J. Phys. Chem. C 116 2012 21472
27. K.W. Kolasinski J. Phys. Chem. C 114 2010 22098
28. K. Peng, J. Hu, Y. Yan, Y. Wu, H. Fang, Y. Xu, S.T. Lee, and J. Zhu Adv. Func. Mater. 16 2006 387