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Volumn 614, Issue , 2014, Pages 173-176
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Thermal annealing impact on crystal quality of (GaIn)2O 3 alloys
a
SAGA UNIVERSITY
(Japan)
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Author keywords
Annealing; Phase separation; Pulsed laser deposition; Semiconducting gallium indium oxide; Spectrophotometer
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Indexed keywords
AMORPHOUS FILMS;
ANNEALING;
CRYSTAL ORIENTATION;
METEOROLOGICAL INSTRUMENTS;
PHASE SEPARATION;
PULSED LASER DEPOSITION;
SAPPHIRE;
SCANNING ELECTRON MICROSCOPY;
SPECTROMETERS;
SPECTROPHOTOMETERS;
SUBSTRATES;
X RAY DIFFRACTION;
AMORPHOUS STRUCTURES;
ELEMENT DISTRIBUTION;
ELEMENTS DISTRIBUTION;
ENERGY DISPERSIVE SPECTROMETERS;
INDIUM OXIDE;
POST-THERMAL ANNEALING;
SUBSTRATE TEMPERATURE;
THERMAL ANNEALING TREATMENT;
GALLIUM ALLOYS;
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EID: 84903990434
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jallcom.2014.06.091 Document Type: Article |
Times cited : (16)
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References (23)
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