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Volumn 57, Issue 6, 2014, Pages 1068-1072

Low frequency wide bandwidth MEMS energy harvester based on spiral-shaped PVDF cantilever

Author keywords

low frequency; piezoelectric energy harvester; PVDF; wide bandwidth

Indexed keywords

BANDWIDTH; ENERGY HARVESTING; FLUORINE COMPOUNDS; HARVESTING; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY;

EID: 84903746957     PISSN: 16747321     EISSN: 18691900     Source Type: Journal    
DOI: 10.1007/s11431-014-5511-7     Document Type: Article
Times cited : (41)

References (21)
  • 1
    • 0037502904 scopus 로고    scopus 로고
    • A study of low level vibrations as a power source for wireless sensor nodes
    • 10.1016/S0140-3664(02)00248-7
    • Roundy S, Wright P K, Rabaey J. A study of low level vibrations as a power source for wireless sensor nodes. Comput Commun, 2003, 26: 1131-1144
    • (2003) Comput Commun , vol.26 , pp. 1131-1144
    • Roundy, S.1    Wright, P.K.2    Rabaey, J.3
  • 2
    • 33846077160 scopus 로고    scopus 로고
    • Energy harvesting vibration sources for microsystems applications
    • 10.1088/0957-0233/17/12/R01
    • Beeby S P, Tudor M J, White N M. Energy harvesting vibration sources for microsystems applications. Meas Sci Tech, 2006, 17: R175-R195
    • (2006) Meas Sci Tech , vol.17
    • Beeby, S.P.1    Tudor, M.J.2    White, N.M.3
  • 3
    • 4544299700 scopus 로고    scopus 로고
    • MEMS electrostatic micropower generator for low frequency operation
    • 10.1016/j.sna.2004.04.026
    • Mitcheson P D, Miao P, Stark B H, et al. MEMS electrostatic micropower generator for low frequency operation. Sens Actuat A Phys, 2004, 115: 523-529
    • (2004) Sens Actuat A Phys , vol.115 , pp. 523-529
    • Mitcheson, P.D.1    Miao, P.2    Stark, B.H.3
  • 4
    • 58149376401 scopus 로고    scopus 로고
    • Parylene-based electret power generators
    • 10.1088/0960-1317/18/10/104006
    • Lo H, Tai Y C. Parylene-based electret power generators. J Micromech Microeng, 2008, 18: 104006
    • (2008) J Micromech Microeng , vol.18 , pp. 104006
    • Lo, H.1    Tai, Y.C.2
  • 5
    • 70350656129 scopus 로고    scopus 로고
    • Electrostatic micro power generation from low-frequency vibration such as human motion
    • 10.1088/0960-1317/19/9/094002
    • Naruse Y, Matsubara N, Mabuchi K, et al. Electrostatic micro power generation from low-frequency vibration such as human motion. J Micromech Microeng, 2009, 19: 094002-1-094002-5
    • (2009) J Micromech Microeng , vol.19 , pp. 0940021-0940025
    • Naruse, Y.1    Matsubara, N.2    Mabuchi, K.3
  • 6
    • 34249335657 scopus 로고    scopus 로고
    • Parabolic trough optical performance analysis techniques
    • 10.1115/1.2710249
    • Liipfert E, Pottler K, Ulmer S, et al. Parabolic trough optical performance analysis techniques. J Sol Energ-T ASME, 2007, 147: 147-152
    • (2007) J Sol Energ-T ASME , vol.147 , pp. 147-152
    • Liipfert, E.1    Pottler, K.2    Ulmer, S.3
  • 7
    • 70350630468 scopus 로고    scopus 로고
    • Vibration energy harvesting with aluminum nitride-based piezoelectric devices
    • 10.1088/0960-1317/19/9/094005
    • Elfrink R, Kamel T M, Goedbloed M, et al. Vibration energy harvesting with aluminum nitride-based piezoelectric devices. J Micromech Microeng, 2009, 19: 094005
    • (2009) J Micromech Microeng , vol.19 , pp. 094005
    • Elfrink, R.1    Kamel, T.M.2    Goedbloed, M.3
  • 8
    • 33645810366 scopus 로고    scopus 로고
    • Piezoelectric nanogenerators based on zinc oxide nanowire arrays
    • 10.1126/science.1124005
    • Wang Z L, Song J. Piezoelectric nanogenerators based on zinc oxide nanowire arrays. Science, 2006, 312: 242-246
    • (2006) Science , vol.312 , pp. 242-246
    • Wang, Z.L.1    Song, J.2
  • 9
    • 84870523882 scopus 로고    scopus 로고
    • A piezoelectric parametric frequency increased generator for harvesting low-frequency vibrations
    • 10.1109/JMEMS.2012.2205901
    • Galchev T, Aktakka E E, Najafi K. A piezoelectric parametric frequency increased generator for harvesting low-frequency vibrations. J Microelectomech Syst, 2012, 21: 1311-1320
    • (2012) J Microelectomech Syst , vol.21 , pp. 1311-1320
    • Galchev, T.1    Aktakka, E.E.2    Najafi, K.3
  • 10
    • 67349175598 scopus 로고    scopus 로고
    • A micro electromagnetic low level vibration energy harvester based on MEMS technology
    • 10.1007/s00542-009-0827-0
    • Wang P, Tanaka K, Sugiyama S, et al. A micro electromagnetic low level vibration energy harvester based on MEMS technology. Microsyst Tech, 2009, 15: 941-951
    • (2009) Microsyst Tech , vol.15 , pp. 941-951
    • Wang, P.1    Tanaka, K.2    Sugiyama, S.3
  • 11
    • 1642525648 scopus 로고    scopus 로고
    • An electromagnetic vibration-powered generator for intelligent sensor systems
    • 10.1016/j.sna.2003.09.045
    • Glynne-Jones P, Tudor M J, Beeby S P, et al. An electromagnetic vibration-powered generator for intelligent sensor systems. Sens Actuat A Phys, 2004, 110: 344-349
    • (2004) Sens Actuat A Phys , vol.110 , pp. 344-349
    • Glynne-Jones, P.1    Tudor, M.J.2    Beeby, S.P.3
  • 12
    • 84894054921 scopus 로고    scopus 로고
    • Design and fabrication of integrated magnetic MEMS energy harvester for low frequency applications
    • 10.1109/JMEMS.2013.2267773
    • Han M D, Yuan Q, Sun X M, et al. Design and fabrication of integrated magnetic MEMS energy harvester for low frequency applications. J Microelectomech Syst, 2014, 23: 204-212
    • (2014) J Microelectomech Syst , vol.23 , pp. 204-212
    • Han, M.D.1    Yuan, Q.2    Sun, X.M.3
  • 13
    • 77950684790 scopus 로고    scopus 로고
    • A hybrid energy harvester based on piezoelectric and electromagnetic mechanisms
    • 10.1117/1.3373516
    • Yang B, Kee W L, Lim S P, et al. A hybrid energy harvester based on piezoelectric and electromagnetic mechanisms. J Micro/Nanolith MEMS MOEMS, 2010, 9: 023002
    • (2010) J Micro/Nanolith MEMS MOEMS , vol.9 , pp. 023002
    • Yang, B.1    Kee, W.L.2    Lim, S.P.3
  • 14
    • 84881367613 scopus 로고    scopus 로고
    • Low-frequency wide-band hybrid energy harvester based on piezoelectric and triboelectric mechanism
    • 10.1007/s11431-013-5270-x
    • Han M D, Zhang X S, Liu W, et al. Low-frequency wide-band hybrid energy harvester based on piezoelectric and triboelectric mechanism. Sci China Tech Sci, 2013, 56: 1835-1841
    • (2013) Sci China Tech Sci , vol.56 , pp. 1835-1841
    • Han, M.D.1    Zhang, X.S.2    Liu, W.3
  • 15
    • 84886998303 scopus 로고    scopus 로고
    • R-Shaped hybrid nanogenerator with enhanced piezoelectricity
    • 10.1021/nn404023v
    • Han M D, Zhang X S, Meng B, et al. r-Shaped hybrid nanogenerator with enhanced piezoelectricity. ACS Nano, 2013, 7: 8554-8560
    • (2013) ACS Nano , vol.7 , pp. 8554-8560
    • Han, M.D.1    Zhang, X.S.2    Meng, B.3
  • 16
    • 42549138834 scopus 로고    scopus 로고
    • The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting
    • 10.1088/0960-1317/18/5/055017
    • Shen D, Park J H, Ajitsaria J, et al. The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting. J Micromech Microeng, 2008, 18: 055017
    • (2008) J Micromech Microeng , vol.18 , pp. 055017
    • Shen, D.1    Park, J.H.2    Ajitsaria, J.3
  • 18
    • 84861496773 scopus 로고    scopus 로고
    • A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz
    • 10.1007/s00542-012-1424-1
    • Liu H C, Lee C K, Kobayashi T, et al. A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz. Microsyst Tech, 2012, 18: 497-506
    • (2012) Microsyst Tech , vol.18 , pp. 497-506
    • Liu, H.C.1    Lee, C.K.2    Kobayashi, T.3
  • 19
    • 84873287753 scopus 로고    scopus 로고
    • An experimentally validated double-mass piezoelectric cantilever model for broadband vibration-based energy harvesting
    • 10.1109/JMEMS.2012.2213069
    • Ou Q, Chen X Q, Gutschmidt S, et al. An experimentally validated double-mass piezoelectric cantilever model for broadband vibration-based energy harvesting. J Microelectomech Syst, 2013, 22: 26-33
    • (2013) J Microelectomech Syst , vol.22 , pp. 26-33
    • Ou, Q.1    Chen, X.Q.2    Gutschmidt, S.3
  • 20
    • 0035780837 scopus 로고    scopus 로고
    • PVDF piezoelectric polymer
    • 10.1108/02602280110388315
    • Ueberschlag P. PVDF piezoelectric polymer. Sensor Rev, 2001, 21: 118-126
    • (2001) Sensor Rev , vol.21 , pp. 118-126
    • Ueberschlag, P.1
  • 21
    • 0032047193 scopus 로고    scopus 로고
    • Monolithic pyroelectric infrared image sensor using PVDF thin film
    • 10.1016/S0924-4247(98)00050-8
    • Fujitsuka N, Sakata J, Miyachi Y, et al. Monolithic pyroelectric infrared image sensor using PVDF thin film. Sens Actuat A Phys, 1998, 66: 237-2433
    • (1998) Sens Actuat A Phys , vol.66 , pp. 237-243
    • Fujitsuka, N.1    Sakata, J.2    Miyachi, Y.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.