Hybrid energy harvester based on piezoelectric and electromagnetic mechanisms

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 9, Issue 2, 2010, Pages

  Yang, Bin ^a   Lee, Chengkuo ^a   Kee, Wei L ^a   Lim, Siak P ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Energy harvester; Piezoelectric and electromagnetic mechanisms; Power density

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROMAGNETIC WAVES; ELECTROMAGNETISM; HARVESTERS; MAGNETS; NANOCANTILEVERS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; TRANSDUCERS;

ELECTROMAGNETIC ENERGY; ELECTROMAGNETIC MECHANISM; ENERGY HARVESTER; G ACCELERATION; HYBRID ENERGY; MAXIMUM OUTPUT; OUTPUT VOLTAGES; PIEZOELECTRIC CANTILEVERS; PIEZOELECTRIC COMPONENTS; POLING DIRECTIONS; POWER DENSITIES; PZT; RELATIVE POSITIONS; TWO LAYERS;

ENERGY HARVESTING;

EID: 77950684790     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3373516     Document Type: Article

References (33)

1. P. D. Mitcheson, P. Miao, B. H. Stark, E. M. Yeatman, A. S. Holmes, and T. C. Green, "MEMS electrostatic micropower generator for low frequency operation," Sens. Actuators, A 115, 523-529 (2004).
2. S. Menigner, J. O. Mur-Miranda, R. Amirtharajah, A. P. Chandrakasan, and J. H. Lang, "Vibration-to-electric energy conversion," IEEE Trans. Very Large Scale Integr. (VLSI) Syst. 9, 64-76 (2001).
3. I. Sari, T. Balkan, and H. Kulah, "A electromagnetic micro power generator for wideband environmental vibrations," Sens. Actuators, A 145, 405-413 (2008).
4. S. P. Beeby, R. N. Torah, M. J. Tudor, P. Glynne-Jones, T. O'Donnell, C. R. Saha, and S. Roy, "A micro electromagnetic generator for vibration energy harvesting," J. Micromech. Microeng. 17, 1257-1265 (2007).
5. F. Lu, H. P. Lee, and S. P. Lim, "Modeling and analysis of micro piezoelectric power generators for micro-electromechanical-systems applications," Smart Mater. Struct. 13, 57-63 (2004).
6. S. Roundy and P. K. Wright, "A piezoelectric vibration based generator for wireless electronics," Smart Mater. Struct. 13, 1131-1142 (2004).
7. J. Q. Liu, H. B. Fang, Z. Y. Xu, X. H. Mao, X. C. Shen, D. Chen, H. Liao, and B. C. Cai, "A MEMS-based piezoelectric power generator array for vibration energy harvesting," Microelectron. J. 39, 802-806 (2008).
8. S. P. Beeby, M. J. Tudor, and N. M. White, "Energy harvesting vibration sources for microsystems applications," Meas. Sci. Technol. 17, R175-R195 (2006).
9. P. D. Mitcheson, E. M. Yeatman, G. K. Rao, A. S. Holmes, and T. C. Green, "Energy harvesting from human and machine motion for wireless electronic devices," Proc. IEEE 96, 1457-1486 (2008).
10. S. Roundy, P. K. Wright, and J. Rabaey, "A study of low level vibrations as a power source for wireless sensor nodes," Comput. Commun. 26, 1131-1144 (2003).
11. D. P. Arnold, "Review of microscale magnetic power generation," IEEE Trans. Magn. 43, 3940-3951 (2007).
12. P. Glynne-Jones, M. J. Tudor, S. P. Beeby, and N. M. White, "An electromagnetic, vibration-powered generated for intelligent sensor systems," Sens. Actuators, A 110, 344-349 (2004).
13. S. Cheng, N. Wang, and D. P. Arnold, "Modeling of magnetic vibrational energy harvesters using equivalent circuit representations," J. Micromech. Microeng. 17, 2328-2335 (2007).
14. Y. C. Shu and I. C. Lien, "Efficiency of energy conversion for a piezoelectric power harvesting system," J. Micromech. Microeng. 16, 2429-2438 (2006).
15. Z. Wang and Y. Xu, "Vibration energy harvesting device based on air-spaced piezoelectric cantilevers," Appl. Phys. Lett. 90, 263512 (2007).
16. G. K. Ottman, H. F. Hofmann, A. C. Bhatt, and G. A. Lesieutre, "Adaptive piezoelectric energy harvesting circuit for wireless remote power supply," IEEE Trans. Power Electron. 17, 669-676 (2002).
17. G. K. Ottman, H. F. Hofmann, and G. A. Lesieutre, "Optimized piezoelectric energy harvesting circuit using step-down converter in discontinuous conduction mode," IEEE Trans. Power Electron. 18, 696-703 (2003).
18. P. D. Mitcheson, E. K. Reilly, T. Toh, P. K. Wright, E. M. Yeatman, "Performance limits of the three MEMS inertial energy generator transduction types," J. Micromech. Microeng. 17, S211-216 (2007).
19. S. Roundy, "On the effectiveness of vibration-based energy harvesting," J. Intell. Mater. Syst. Struct. 16, 809-823 (2005).
20. G. Poulin, E. Sarraute, and F. Costa, "Generation of electrical energy for portable devices: comparative study of an electromagnetic and a piezoelectric system," Sens. Actuators, A 116, 461-471 (2004).
21. T. Wacharasindhu and J. W. Kwon, "A micromachined energy harvester from a keyboard using combined electromagnetic and piezoelectric conversion," J. Micromech. Microeng. 18, 104016 (2008).
22. A. D. Yalcinkaya, O. Ergeneman, and H. Urey, "Polymer magnetic scanners for bar code applications," Sens. Actuators, A 17, 236-243 (2007).
23. B. Yang, C. Lee, W. F. Xiang, J. Xie, H. He, R. K. Kotlanka, S. P. Low, and H. H. Feng, "Electromagnetic energy harvesting from vibrations of multiple frequencies," J. Micromech. Microeng. 19, 035001 (2009).
24. D. N. Shen, J. H. Park, J. Ajitsaria, S. Y. Choe, H. C. Wikle III, and D. J. Kim, "The design, fabrication and evaluation of a MEMS PZT cantilever with integrated Si proof mass for vibration energy harvesting," J. Micromech. Microeng. 18, 055017 (2008).
25. H. Kulah and K. Najafi, "Energy scavenging from low-frequency vibrations by using frequency up-conversion for wireless sensor applications," IEEE Sens. J. 8, 261-268 (2008).
26. ANSI/IEEE "IEEE standard on piezoelectricity std," pp. 176-1987 (1987).
27. S. J. Roundy, "Energy scavenging for wireless sensor nodes with a focus on vibration to electricity conversion," PhD Thesis, Univ. of California, Berkeley (2003).
28. L. Q. Yao, J. G. Zhang, L. Lu, and M. O. Lai, "Nonlinear dynamic characteristics of piezoelectric bending actuators under strong applied electric field," J. Microelectromech. Syst. 13, 645-652 (2004).
29. P. Glynne-Jones, S. P. Beeby, and N. M. White, "Towards a piezoelectric vibration powered microgenerator," IEE Proc.: Sci., Meas. Technol. 148, 68-72 (2001).
30. H. A. Sodano, G. Park, and D. J. Inman, "Estimation of electric charge output for piezoelectric energy harvesting," Strain 40, 49-58 (2004).
31. A. Bayrashev, W. P. Robbins, and B. Ziaie, "Low frequency wireless powering of microsystrems using piezoelectric-magnetostrictive laminate composites," Sens. Actuators, A 114, 244-249 (2004).
32. D. N. Shen, J. H. Park, J. H. Noh, S. Y. Choe, S. H. Kim, H. C. Wikle III, and D. J. Kim, "Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting," Sens. Actuators, A 154, 103-108 (2009).
33. M. Marzencki, B. Charlot, S. Basrour, M. Colin, and L. Valbin, "Design and fabrication of piezoelectric micro power generators for autonomous microsystems," in Symp. on Design Testing Integration and Packaging of MEMS/MOEMS (DTIP7'05), B. Courtois, Ed., Montreux, Switzerland, pp. 299-302, Springer, Netherlands (2005).