Design and fabrication of integrated magnetic MEMS energy harvester for low frequency applications

Journal of Microelectromechanical Systems

Volumn 23, Issue 1, 2014, Pages 204-212

  Han, Mengdi ^a   Yuan, Quan ^a,b   Sun, Xuming ^a   Zhang, Haixia ^a  

^a PEKING UNIVERSITY   (China)

^b INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

Conimnp electroplating; Electromagnetic energy harvester; Low frequency; System level simulation

Indexed keywords

EID: 84894054921     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2267773     Document Type: Article

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