Monolithic pyroelectric infrared image sensor using PVDF thin film

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 237-243

  Fujitsuka, Norio ^a   Sakata, Jiro ^a   Miyachi, Yukio ^a   Mizuno, Kentaro ^a   Ohtsuka, Kazuo ^a   Taga, Yasunori ^a   Tabata, Osamu ^b  

^a Rd Management Section   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Infrared; Micromachining; PVDF; Pyroelectric; Sensors

Indexed keywords

ELECTRODEPOSITION; FLUORINE CONTAINING POLYMERS; INFRARED DETECTORS; MEMBRANES; MICROMACHINING; MOSFET DEVICES; PLASTIC FILMS; PYROELECTRICITY; SILICON NITRIDE; VINYL RESINS;

ELECTRO SPRAY (ESP) DEPOSITION; POLYVINYLIDENE FLUORIDE;

IMAGE SENSORS;

EID: 0032047193     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00050-8     Document Type: Article

References (8)

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