Bottom-up superconducting and Josephson junction devices inside a group-IV semiconductor

Nature Communications

Volumn 5, Issue , 2014, Pages

  Shim, Yun Pil ^a,b   Tahan, Charles ^a  

^a LABORATORY FOR PHYSICAL SCIENCES   (United States)

^b University of Maryland   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GERMANIUM; QUANTUM DOT; SILICON;

QUANTUM MECHANICS; SENSOR; SILICON; SUPERCONDUCTIVITY;

ARTICLE; ELECTRICAL EQUIPMENT; ELECTRODE; ENERGY; SEMICONDUCTOR; SOLID STATE; SUPERCONDUCTING QUANTUM INTERFERENCE DEVICE; TEMPERATURE;

EID: 84903699302     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms5225     Document Type: Article

References (74)

1. Clarke, J., Goubau, W. M. & Ketchen, M. B. Tunnel junction dc SQUID: fabrication, operation, and performance. J. Low Temp. Phys. 25, 99-144 (1976).
2. Niemeyer, J., Hinken, J. H. & Kautz, R. L. Microwave-induced constant-voltage steps at one volt from a series array of Josephson junctions. Appl. Phys. Lett. 45, 478-480 (1984). (Pubitemid 14623101)
3. Benz, S. P. & Hamilton, C. A. A pulse-driven programmable Josephson voltage standard. Appl. Phys. Lett. 68, 3171-3173 (1996). (Pubitemid 126684244)
4. Likharev, K. K. & Semenov, V. K. RSFQ logic/memory family: a new Josephson-junction technology for sub-terahertz-clock-frequency digital systems. IEEE Trans. Appl. Supercond. 1, 3-28 (1991).
5. Devoret, M. H. & Schoelkopf, R. J. Superconducting circuits for quantum information: an outlook. Science 339, 1169-1174 (2013).
6. Anacker, W. Josephson compuer technology. IBM J. Res. Develop. 24, 107-112 (1980).
7. Gurvitch, M., Washington, M. A. & Huggins, H. A. High quality refractory Josephson tunnel junctions utilizing thin aluminum layers. Appl. Phys. Lett. 42, 472-474 (1983).
8. Ketchen, M. B. et al. Sub-mm, planarized, Nb-AlOx-Nb Josephson process for 125mm wafers developed in partnership with Si technology. Appl. Phys. Lett. 59, 2609-2611 (1991).
9. Nakagawa, H. et al. A 4-bit Josephson computer ETL-JC1. IEEE Trans. Appl. Supercond. 1, 37-47 (1991).
10. Kim, Z. et al. Anomalous avoided level crossings in a Cooper-pair box spectrum. Phys. Rev. B 78, 144506 (2008).
11. Kline, J. S. et al. Sub-micrometer epitaxial Josephson junctions for quantum circuits. Supercond. Sci. Technol. 25, 025005 (2012a).
12. Chang, J. B. et al. Improved superconducting qubit coherence using titanium nitride. Appl. Phys. Lett. 103, 012602 (2013).
13. Vijay, R., Sau, J. D., Cohen, M. L. & Siddiqi, I. Optimizing anharmonicity in nanoscale weak link Josephson junction oscillators. Phys. Rev. Lett. 103, 087003-087006 (2009).
14. Gladchenko, S. et al. Superconducting nanocircuits for topologically protected qubits. Nat. Phys. 5, 48-53 (2005).
15. Paik, H. et al. Observation of high coherence in Josephson junction qubits measured in a three-dimensional circuit QED architecture. Phys. Rev. Lett. 107, 240501 (2011).
16. Fuechsle, M. et al. A single-atom transistor. Nat. Nanotechnol. 7, 242-246 (2012).
17. Bustarret, E. et al. Superconductivity in doped cubic silicon. Nature 444, 465-468 (2006). (Pubitemid 44809060)
18. Herrmannsdörfer, T. et al. Superconducting state in a gallium-doped germanium layer at low temperatures. Phys. Rev. Lett. 102, 217003 (2009).
19. Cohen, M. L. The existence of a superconducting state in semiconductors. Rev. Mod. Phys. 36, 240-243 (1964).
20. Tyryshkin, A. M. et al. Electron spin coherence exceeding seconds in highpurity silicon. Nat. Mater. 11, 143-147 (2012).
21. 28Si 'semiconductor vacuum'. Science 336, 1280-1283 (2012).
22. Blase, X., Bustarret, E., Chapelier, C., Klein, T. & Marcenat, C. Superconducting group-IV semiconductors. Nat. Mater. 8, 375-382 (2009).
23. Skrotzki, R. et al. On-chip superconductivity via gallium overdoping of silicon. Appl. Phys. Lett. 97, 192505 (2010).
24. Skrotzki, R. et al. The impact of heavy Ga doping on superconductivity in germanium. J. Low Temp. Phys. 37, 877-883 (2011).
25. Scappucci, G. et al. A complete fabrication route for atomic-scale, donor-based devices in single-crystal germanium. Nano Lett. 11, 2272-2279 (2011a).
26. Kane, B. E. A silicon-based nuclear spin quantum computer. Nature 393, 133-137 (1998). (Pubitemid 28242245)
27. Weber, B. et al. Ohm's law survives to the atomic scale. Science 335, 64-67 (2012).
28. Scappucci, G., Capellini, G., Klesse, W. M. & Simmons, M. Y. Phosphorus atomic layer doping of germanium by the stacking of multiple δ layers. Nanotechnology 22, 375203 (2011b).
29. Klesse, W. M., Scappucci, G., Capellini, G., Hartmann, J. M. & Simmons, M. Y. Atomic layer doping of strained Ge-on-insulator thin films with high electron densities. Appl. Phys. Lett. 102, 151103 (2013).
30. McKibbin, S., Scappucci, G., Pok, W. & Simmons, M. Epitaxial top-gated atomic-scale silicon wire in a three-dimensional architecture. Nanotechnology 24, 045303 (2013).
31. Iakoubovskii, K. Recent advances in superconductivity of covalent superconductors. Physica C 469, 675-679 (2009).
32. Ekimov, E. A. et al. Superconductivity in diamond. Nature 428, 542-545 (2004). (Pubitemid 38480534)
33. Takano, Y. et al. Superconductivity in diamond thin films well above liquid helium temperature. Appl. Phys. Lett. 85, 2851-2853 (2004).
34. Takano, Y. et al. Superconducting properties of homoepitaxial CVD diamond. Diam. Relat. Mater. 16, 911-914 (2007). (Pubitemid 46552213)
35. Marcenat, C. et al. Low-temperature transition to a superconducting phase in boron-doped silicon films grown on (001)-oriented silicon wafers. Phys. Rev. B 81, 020501-020504(R) (2010).
36. Dahlem, F. et al. Subkelvin tunneling spectroscopy showing Bardeen-Cooper- Schrieffer superconductivity in heavily boron-doped silicon epilayers. Phys. Rev. B 82, 140505(R) (2010).
37. Fiedler, J. et al. Superconducting films fabricated by high-fluence Ga implantation in Si. Phys. Rev. B 83, 214504 (2011).
38. Fiedler, J. et al. Superconducting Ga-overdoped Ge layers capped with SiO2: structural and transport investigations. Phys. Rev. B 85, 134530 (2012).
39. Bardeen, J., Cooper, L. N. & Schrieffer, J. R. Theory of Superconductivity. Phys. Rev. 108, 1175-1204 (1957).
40. Marder, M. P. Condensed Matter Physics (John-Wiley & Sons, Inc., 2000).
41. Tinkham, M. Introduction to Superconductivity 2nd edn (McGraw-Hill Book Co., 1996).
42. Lyding, J. W., Shen, T., Hubacek, J. S., Tucker, J. R. & Abeln, G. C. Nanoscale patterning and oxidation of Hpassivated Si(100)2Ã-1 surfaces with an ultrahigh vacuum scanning tunneling microscope. Appl. Phys. Lett. 64, 2010-2012 (1994).
43. Fuechsle, M. et al. Spectroscopy of few-electron single-crystal silicon quantum dots. Nat. Nanotechnol. 5, 502-505 (2010).
44. Gasseller, M. et al. Single-electron capacitance spectroscopy of individual dopants in silicon. Nano Lett. 11, 5208-5212 (2011).
45. Grockowiak, A. et al. Superconducting properties of laser annealed implanted Si:B epilayers. Supercond. Sci. Technol. 26, 045009 (2013).
46. Tinkham, M. & Lau, C. N. Quantum limit to phase coherence in thin superconducting wires. Appl. Phys. Lett. 80, 2946-2948 (2002).
47. Likharev, K. K. Superconducting weak links. Rev. Mod. Phys. 51, 101-159 (1979).
48. Ambegaokar, V. & Baratoff, A. Tunneling between superconductors. Phys. Rev. Lett. 10, 486-489 (1963).
49. Kulik, I. O. & Omel'yanchuk, A. N. Zh. Eskp. Teor. Fiz. Pis. Red. 21, 216 (1975); trans. JETP Lett. 21, 96 (1975).
50. Bourgeois, E. & Blase, X. Superconductivity in doped cubic silicon: An ab initio study. Appl. Phys. Lett. 90, 142511 (2007).
51. Maezawa, M. & Shoji, A. Overdamped Josephson junctions with Nb/AlOx/Al/ AlOx/Nb structure for integrated circuit application. Appl. Phys. Lett. 70, 3603-3605 (1997). (Pubitemid 127637270)
52. Vijay, R., Levenson-Falk, E. M., Slichter, D. H. & Siddiqi, I. Approaching ideal weak link behavior with three dimensional aluminum nanobridges. Appl. Phys. Lett. 96, 223112 (2010).
53. Mooij, J. E. et al. Josephson persistent-current qubit. Science 285, 1036-1039 (1999).
54. Chiorescu, I., Nakamura, Y., Harmans, C. J. P. M. & Mooij, J. E. Coherent quantum dynamics of a superconducting flux qubit. Science 299, 1869-1871 (2003). (Pubitemid 36356651)
55. Koch, J. et al. Charge-insensitive qubit design derived from the Cooper pair box. Phys. Rev. A 76, 042319 (2007).
56. Shamim, S., Mahapatra, S., Polley, C., Simmons, M. Y. & Ghosh, A. Suppression of low-frequency noise in two-dimensional electron gas at degenerately doped Si:P delta layers. Phys. Rev. B 83, 233304 (2011).
57. Weir, B. E. et al. Electrical characterization of an ultrahigh concentration boron delta doping layer. Appl. Phys. Lett. 65, 737-739 (1994).
58. Golubov, A. A., Kupriyanov, M. Y. & Il'ichev, E. The current-phase relation in Josephson junctions. Rev. Mod. Phys. 76, 411-469 (2004). (Pubitemid 39063521)
59. Becker, P., Pohl, H.-J., Riemann, H. & Abrosimov, N. Enrichment of silicon for a better kilogram. Phys. Status Solidi A 207, 49-66 (2010).
60. Anton, S. M. et al. Magnetic flux noise in dc SQUIDs: temperature and geometry dependence. Phys. Rev. Lett. 110, 147002 (2013).
61. Bialczak, R. C. et al. 1/f Flux noise in Josephson phase qubits. Phys. Rev. Lett. 99, 187006 (2007).
62. Sank, D. et al. Flux noise probed with real time qubit tomography in a Josephson phase qubit. Phys. Rev. Lett. 109, 067001 (2012).
63. Yoshihara, F., Harrabi, K., Niskanen, A. O., Nakamura, Y. & Tsai, J. S. Decoherence of flux qubits due to 1/f flux noise. Phys. Rev. Lett. 97, 167001 (2006).
64. Kakuyanagi, K. et al. Dephasing of a superconducting flux qubit. Phys. Rev. Lett. 98, 047004 (2007).
65. Sendelbach, S. et al. Magnetism in SQUIDs at millikelvin temperatures. Phys. Rev. Lett. 100, 227006 (2008).
66. Sendelbach, S., Hover, D., Mück, M. & McDermott, R. Complex inductance, excess noise, and surface magnetism in dc SQUIDs. Phys. Rev. Lett. 103, 117001 (2009).
67. Wu, J. & Yu, C. C. Modeling flux noise in SQUIDs due to hyperfine interactions. Phys. Rev. Lett. 108, 247001 (2012).
68. 3 barrier. Supercond. Sci. Technol. 18, 1396-1399 (2005). (Pubitemid 41336496)
69. Oh, S. et al. Elimination of two level fluctuators in superconducting quantum bits by an epitaxial tunnel barrier. Phys. Rev. B 74, 100502(R) (2006).
70. Kline, J. S. et al. Sub-micrometer epitaxial Josephson junctions for quantum circuits. Supercond. Sci. Technol. 25, 025005 (2012b).
71. Kline, J. S., Wang, H., Oh, S., Martinis, J. M. & Pappas, D. P. Josephson phase qubit circuit for the evaluation of advanced tunnel barrier materials. Supercond. Sci. Technol. 22, 015004 (2009).
72. Doh, Y.-J. et al. Tunable supercurrent through semiconductor nanowires. Science 309, 272-275 (2005). (Pubitemid 40967857)
73. Ruskov, R. & Tahan, C. On-chip cavity quantum phonodynamics with an acceptor qubit in silicon. Phys. Rev. B 88, 064308 (2013).
74. Nayak, C., Simon, S. H., Stern, A., Freedman, M. & Sarma, S. D. Non-Abelian anyons and topological quantum computation. Rev. Mod. Phys. 80, 1083-1159 (2008).