On the temperature dependence of mobility in hydrogenated indium-doped ZnO thin films

Acta Materialia

Volumn 77, Issue , 2014, Pages 125-132

  Singh, Anil ^a   Chaudhary, Sujeet ^a   Pandya, Dinesh K ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

Hydrogen; Passivation; Reactively sputtered; Scattering model

Indexed keywords

ANNEALING; DEPOSITION; INDIUM; PASSIVATION; PHOTOLUMINESCENCE SPECTROSCOPY; SCATTERING; ZINC;

DONOR CONCENTRATIONS; INDIUM-DOPED ZNO THIN FILMS; IONIZED IMPURITIES; REACTIVELY SPUTTERED; SCATTERING MODEL; TEMPERATURE DEPENDENCE; TEMPERATURE DEPENDENT; TEMPERATURE REGIMES;

HYDROGEN;

EID: 84903250021     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2014.05.048     Document Type: Article

References (29)

1. S.J. Pearton, D.P. Norton, K. Ip, Y.W. Heo, and T. Steiner Prog Mater Sci 50 2005 293
2. H. Zeng, X. Xu, Y. Bando, U.K. Gautam, T. Zhai, and Fang. Xi et al. Adv Funct Mater 19 2009 3165
3. K.L. Chopra, S. Major, and D.K. Pandya Thin Solid Films 102 1983 1
4. S. Major, A. Banerjee, and K.L. Chopra Thin Solid Films 108 1983 333
5. V. Bhosle, A. Tiwari, and J. Narayan Appl Phys Lett 88 2006 032106
6. A.K. Pradhan, L. Douglas, H. Mustata, R. Mundle, D. Hunter, and C.E. Bonner Appl Phys Lett 90 2007 072108
7. O. Bamiduro, H. Mustafa, R. Mundle, R.B. Konda, and A.K. Pradhan Appl Phys Lett 90 2007 252108
8. A. Singh, S. Chaudhary, and D.K. Pandya Appl Phys Lett 102 2013 172106
9. C.G. Van de Walle, and J. Neugebauer Nature (London) 423 2003 626
10. C.G. Van de Walle Phys Rev Lett 85 2000 1012
11. S.F.J. Cox, E.A. Davis, S.P. Cottrell, P.J.C. King, J.S. Lord, and J.M. Gil et al. Phys Rev Lett 86 2001 2601
12. D.M. Hofmann, A. Hofstaetter, F. Leiter, H. Zhou, F. Henecker, and B.K. Meyer et al. Phys Rev B 88 2002 045504
13. E.V. Lavrov, F. Herklotz, and J. Weber Phys Rev B 79 2009 165210
14. M. Matsubara, M.N. Amini, R. Saniz, D. Lamoen, and B. Partoens Phys Rev B 86 2012 165207
15. A. Kronenberger, A. Polity, D.M. Hofmann, B.K. Meyer, A. Schleife, and F. Bechstedt Phys Rev B 86 2012 115334
16. D.C. Look, K.D. Leedy, L. Vines, B.G. Svensson, A. Zubiaga, and F. Tuomisto et al. Phys Rev B 84 2011 115202
17. D.C. Look, K.D. Leedy, D.H. Tomich, and B. Bayraktaroglu Appl Phys Lett 96 2010 062102
18. D.C. Look Electrical characterization of Ga as materials and devices 1989 Wiley New York [chapter 1]
19. Ellmer K, Klein A, Rech B. Transparent conductive zinc oxide. In: Springer series in materials science, vol. 104. Springer; 2008
20. J.T. Lian, J.H. Ye, Liou Jian-Ye, Tsao Kai-C, Chen N. Chuan, and T.Y. Lin J Mater Chem C 1 2013 6559
21. G. Ballerini, K. Ogle, and M.G. Barthe Labrousse Appl Surf Sci 253 2007 6860
22. D.L. Rode Semicond Semimet 10 1975 1
23. D.J. Howarth, and E.H. Sondheimer Proc R Soc A 219 1953 53
24. A. Janotti, and C.G. Van de Walle Phys Rev B 76 2007 165202
25. S.J. Clark, J. Robertson, S. Lany, and A. Zunger Phys Rev B 81 2010 115311
26. P. Gopal, and N.A. Spaldin J Electron Mater 35 2006 538
27. R.C. Scott, K.D. Leedy, B. Bayraktaroglu, D.C. Look, and Y.H. Zhang Appl Phys Lett 97 2010 072113
28. M.M. Can, S.I. Shah, M.F. Doty, C.R. Haughn, and T. Firat J Phys D: Appl Phys 45 2012 195104
29. P.S. Xu, Y.M. Sun, C.S. Shi, F.Q. Xu, and H.B. Pan Nucl Instrum Methods Phys Res B 199 2003 286