Structure and composition of zirconium carbide thin-film grown by ion beam sputtering for optical applications

AIP Conference Proceedings

Volumn 1591, Issue , 2014, Pages 869-871

  Singh, Amol ^a   Modi, Mohammed H ^a   Dhawan, Rajnish ^a   Lodha, G S ^a  

^a RAJA RAMANNA CENTRE FOR ADVANCED TECHNOLOGY   (India)

Author keywords

Ion beam evaporation; Multilayers; Thin films; X ray optics; X ray reflectivity

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBIDES; FILM PREPARATION; MULTILAYERS; SILICON WAFERS; SOLID STATE PHYSICS; SURFACE MORPHOLOGY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

COMPOUND MATERIAL; GRAZING INCIDENCE X-RAY REFLECTIVITIES; ION BEAM SPUTTERING METHODS; ION-BEAM EVAPORATION; ION-BEAM SPUTTERING; OPTICAL APPLICATIONS; SURFACE CHEMICAL COMPOSITION; X RAY REFLECTIVITY;

ZIRCONIUM COMPOUNDS;

EID: 84903192722     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.4872785     Document Type: Conference Paper

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