Magnetron sputtered nanostructured cadmium oxide films for ammonia sensing

Journal of Solid State Chemistry

Volumn 214, Issue , 2014, Pages 24-29

  Dhivya, P ^a   Prasad, A K ^b   Sridharan, M ^a  

^a SASTRA UNIVERSITY   (India)

^b INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH   (India)

Author keywords

Ammonia; CdO Films; Film thickness; Sensor; Sputtering

Indexed keywords

AMMONIA; CADMIUM; CHEMICAL SENSORS; DEPOSITION; FILM THICKNESS; MAGNETRONS; SCANNING ELECTRON MICROSCOPY; SENSORS; SPUTTERING; SUBSTRATES; X RAY DIFFRACTION;

CDO FILMS; ELLIPTICAL STRUCTURES; FIELD EMISSION SCANNING ELECTRON MICROSCOPES; INTER-DIGITATED ELECTRODES; LOW OPERATING TEMPERATURE; PREFERRED ORIENTATIONS; REACTIVE DC MAGNETRON SPUTTERING; UNIFORM DISTRIBUTION;

OXIDE FILMS;

EID: 84901016609     PISSN: 00224596     EISSN: 1095726X     Source Type: Journal    
DOI: 10.1016/j.jssc.2013.11.030     Document Type: Article

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