메뉴 건너뛰기




Volumn 23, Issue 10, 2008, Pages

Optical behaviour of ion beam sputtered a-Si thin films

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; AMORPHOUS SILICON; BEAM PLASMA INTERACTIONS; BOROSILICATE GLASS; ENERGY GAP; GALLIUM ALLOYS; ION BEAMS; ION BOMBARDMENT; IONS; OPTICAL CONSTANTS; OPTICAL PROPERTIES; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SOLIDS; SPUTTERING; THICK FILMS; THIN FILMS;

EID: 56349140655     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/23/10/105020     Document Type: Article
Times cited : (8)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.