Predicting the material removal in polishing: The applicability of two types of statistical models

Machining Science and Technology

Volumn 18, Issue 2, 2014, Pages 199-220

  Jin, X L ^a,b   Zhang, L C ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

contact mechanics; material removal; polishing; polishing pad; statistical model

Indexed keywords

DEFORMATION;

ASPERITY INTERACTIONS; CONTACT MECHANICS; MATERIAL REMOVAL; MATERIAL REMOVAL RATE; POLISHING PADS; STATISTICAL MODELING; STATISTICAL MODELLING; VOLUME CONCENTRATION;

POLISHING;

EID: 84900869253     PISSN: 10910344     EISSN: 15322483     Source Type: Journal    
DOI: 10.1080/10910344.2014.897838     Document Type: Article

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