PTB's enhanced stitching approach for the high-accuracy interferometric form error characterization of spheres

Measurement Science and Technology

Volumn 25, Issue 6, 2014, Pages

  Bartl, Guido ^a   Krystek, Michael ^a   Nicolaus, Arnold ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

form error; roundness; silicon sphere; sphere interferometer; sub aperture stitching

Indexed keywords

INTERFEROMETERS;

FORM DEVIATION; FORM ERRORS; HIGH-ACCURACY; IS-ENABLED; PHYSIKALISCH-TECHNISCHE BUNDESANSTALT; ROUNDNESS; SUB-APERTURE STITCHING; SYSTEMATIC DEVIATION;

SPHERES;

EID: 84900496029     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/25/6/064002     Document Type: Article

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