Sphericity measurement using stitching interferometry

Key Engineering Materials

Volumn 523-524, Issue , 2012, Pages 883-888

  Hagino, Takeshi ^a   Yokoyama, Yuichiro ^a   Kuriyama, Yutaka ^a   Haitjema, Han ^b  

^a Mitutoyo Tsukuba Laboratory   (Japan)

^b Mitutoyo Research Center Europe BV   (Netherlands)

Author keywords

Fizeau interferometer; Sphere; Sphericity; Stitching technique

Indexed keywords

INTERFEROMETERS; LASER OPTICS; PRECISION ENGINEERING; SPHERES;

FIZEAU INTERFEROMETERS; FIZEAU-TYPE INTERFEROMETERS; MEASUREMENT SYSTEM; METROLOGICAL APPLICATIONS; ROUNDNESS MEASUREMENT; SPHERICITY; STITCHING INTERFEROMETRY; STITCHING TECHNIQUES;

INTERFEROMETRY;

EID: 84870599869     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/KEM.523-524.883     Document Type: Conference Paper

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