Porous silicon formation during Au-catalyzed etching

Journal of Applied Physics

Volumn 115, Issue 16, 2014, Pages

  Algasinger, Michael ^a   Bernt, Maximilian ^a   Koynov, Svetoslav ^a   Stutzmann, Martin ^a  

^a WALTER SCHOTTKY INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; OPTICAL DATA PROCESSING; POROUS SILICON; SCANNING ELECTRON MICROSCOPY;

CROSS-SECTIONAL SCANNING ELECTRON MICROSCOPIES; DIFFERENT STAGES; ELECTROCHEMICAL ETCH PROCESS; OPTICAL MEASUREMENT; PHOTOVOLTAIC APPLICATIONS; POROUS SILICON FORMATION; TWO-LAYER STRUCTURES; WET-CHEMICAL ETCH;

SILICON;

EID: 84900003548     PISSN: 00218979     EISSN: 10897550     Source Type: Journal    
DOI: 10.1063/1.4873892     Document Type: Article

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