Off-line inspection method of microlens array for illumination homogenization in DUV lithography machine

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 9046, Issue , 2013, Pages

  Zhang, Fang ^a,b   Zhu, Jing ^a   Yang, Baoxi ^a,b   Huang, Lihua ^a,b   Hu, Xiaobang ^a   Xiao, Yanfen ^a   Huang, Huijie ^a,b  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

illumination homogenization; microlens array; off line inspection of MLA; optical lithography; subaperture stitching

Indexed keywords

PHOTOLITHOGRAPHY;

CRITICAL DIMENSION UNIFORMITIES; HOMOGENEOUS ILLUMINATION; ILLUMINATION UNIFORMITY; MICRO-LENS ARRAYS; OFF-LINE INSPECTIONS; REFRACTIVE MICROLENS ARRAYS; SUB-APERTURE STITCHING; THEORETICAL SIMULATION;

OPTICAL INSTRUMENT LENSES;

EID: 84899826366     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2037841     Document Type: Conference Paper

References (11)

1. Arnold, W. H., "Toward 3nm overlay and critical dimension uniformity: an integrated error budget for double patterning lithography," Proc. SPIE 6924, 692404 (2008).
2. Ganser, H.; Darscht, M.; Miklyaev, Y.; Hauschild, D. and Aschke, L., "High-throughput homogenizers for hyper-NA illumination systems," Proc. SPIE 6154, 61542N (2006).
3. Bizjak, T., Mitra, T. and Aschke, L., "Novel high-throughput micro-optical beam shapers reduce the complexity of macro-optics in hyper-NA illumination systems," Proc. SPIE 6520, 65202X (2007).
4. Bizjak, T., Mitra, T., Hauschild, D. and Aschke, L., "Novel refractive optics enable multipole off-axis illumination," Proc. SPIE 6924, 69242J (2008).
5. Dickey, F. M. and Holswade, S. C., LASER BEAM SHAPING: THEPRY AND TECHNIQUES], Marcel Dekker Publishers, New York & Basel, 273-311 (2000).
6. Zimmermann, M., Lindlein, N., Voelkel, R. and Weible, K. J., "Microlens laser beam homogenizer - From theory to application," Proc. SPIE 6663, 666302 (2007).
7. Goodman, J. W., Introduction to Fourier optics], Roberts & Company Publishers, 97-126 (2005).
8. Miklyaev, Y., Hauschild, D., Mikhailov, A. and Lissotschenko, V. "Beam shaping on the base of micro lenslet arrays with the help of diffraction and interference effects," Proc. SPIE 6663, 666308 (2007).
9. Deng, X., Liang, X., Chen, Z., Yu, W. and Ma, R., "Uniform illumination of large targets using a lens array," Appl Optics 25(3), 377-381 (1986).
10. Butner, A. and Zeitner, U. D., "Wave optical analysis of light-emitting diode beam shaping using microlens arrays," Optical Engineer 41(10), 2393-2401 (2002).
11. Tervo, J., Turunen, J., Vahimaa, P. and Wyrowski, F., "Shifted-elementary-mode representation for partially coherent vectorial fields," Optical Society of America 27 (9), 2004-2014 (2010).