Microlens laser beam homogenizer - From theory to application

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6663, Issue , 2007, Pages

  Zimmermann, Maik ^a   Lindlein, Norbert ^b   Voelkel, Reinhard ^c   Weible, Kenneth J ^c  

^a Bayerische Laserzentrum GmbH   (Germany)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^c SUSS MICROOPTICS SA   (Switzerland)

Author keywords

Coherence; Diffraction; Diffuser; Flat top; Homogenizer; Laser; Microlens; Shaping

Indexed keywords

LASER BEAMS; MICROLENSES; MICROMACHINING;

COMBUSTION DIAGNOSTICS; MATERIAL ANALYSIS; MICROLENS BEAM HOMOGENIZERS; SEMICONDUCTOR LITHOGRAPHY;

LASER APPLICATIONS;

EID: 42149137310     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.731391     Document Type: Conference Paper

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