Novel high throughput microoptical beam shapers reduce the complexity of macrooptics in hyper-NA illumination systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6520, Issue PART 2, 2007, Pages

  Bizjak, T ^a   Mitra, T ^a   Aschke, L ^a  

^a LIMO Lissotschenko Mikrooptik GmbH   (Germany)

Author keywords

Aberration compensation homogeneity; Adjustable homogeneous radiant intensity; Asymmetric cylindrical lenses; Decentered lenses; Free form surface; Homogenizer; Microlens array; Modular beam shaping; Tilted illumination

Indexed keywords

CALCIUM FLUORIDE; DIFFRACTIVE OPTICAL ELEMENTS; LIGHTING; MONOLITHIC INTEGRATED CIRCUITS; PARAMETER ESTIMATION; PHOTOLITHOGRAPHY; POLARIZATION;

ABERRATION COMPENSATION HOMOGENEITY; ADJUSTABLE HOMOGENEOUS RADIANT INTENSITY; ASYMMETRIC CYLINDRICAL LENSES; DECENTERED LENSES; FREE FORM SURFACES; MICROLENS ARRAY; MODULAR BEAM SHAPING; TILTED ILLUMINATION;

MICROOPTICS;

EID: 35148826900     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.712124     Document Type: Conference Paper

References (7)

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3. nd International Symposium on Immersion Lithography, 2005
4. H. Ganser, L. Aschke, M. Darscht, Y. Miklyaev, D. Hauschild "How Refractive Microoptics Enable Lossless Hyper-NA Illumination Systems for Immersion Lithography", European Mask and Lithography Conference, Dresden, 2006
5. P. Rai-Choudhury: Handbook of Microlithography, Micromachining and Microfabrication. Vol. 1, pp. 71-74
6. H. Ganser, M. Darscht, Y. Miklyaev, D. Hauschild, L. Aschke, Proceedings of SPIE: Optical Microlithography, San Jose, 2006
7. nd International Symposium on Immersion Lithography, Kyoto, 2006