Influences of deposition temperature on characteristics of B-doped ZnO films deposited by metal-organic chemical vapor deposition

Thin Solid Films

Volumn 559, Issue , 2014, Pages 83-87

  Maejima, K ^a   Koida, T ^b   Sai, H ^b   Matsui, T ^b   Saito, K ^c   Kondo, M ^b   Takagawa, T ^a  

^a Photovoltaic Power Generation Technology Research Association PVTEC   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c FUKUSHIMA UNIVERSITY   (Japan)

Author keywords

Boron doped zinc oxide; Chemical vapor reactions; Deposition mechanism; Metal organic chemical vapor deposition; Transparent conducting oxide; Zinc oxide

Indexed keywords

METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDE FILMS; VAPORS; ZINC OXIDE;

BORON-DOPED; CHEMICAL VAPOR REACTION; DEPOSITION MECHANISM; METAL-ORGANIC; TRANSPARENT CONDUCTING OXIDE;

DEPOSITION;

EID: 84899554810     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2013.11.137     Document Type: Conference Paper

References (28)

1. U Ozgur, Ya.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Doan, V. Avrutin, S.-J. Cho, and H. Morkoç J. Appl. Phys. 98 2005 041301
2. K. Nakahara, S. Akasaka, H. Yuji, K. Tamura, T. Fujii, Y. Nishimoto, D. Takamizu, A. Sasaki, T. Tanabe, H. Takasu, H. Amaike, T. Onuma, S.F. Chichibu, A. Tsukazaki, A. Ohtomo, and M. Kawasaki Appl. Phys. Lett. 97 2010 013501
3. T. Takagi, H. Tanaka, Sz. Fujita, and Sg. Fujita Jpn. J. Appl. Phys. 42 2003 L401
4. K. Ellmer, A. Klein, and B. Rech Transparent Conductive Zinc Oxide 2008 Springer New York
5. G.B. Stringfellow Organometallic Vapor-Phase Epitaxy: Theory and Practice 1999 Academic Press San Diego
6. W.W. Wenas, A. Yamada, M. Konagai, and K. Takahashi Jpn. J. Appl. Phys. 30 1991 L441
7. W.W. Wenas, A. Yamada, K. Takahashi, M. Yoshino, and M. Konagai J. Appl. Phys. 70 1991 7119
8. B. Sang, Y. Nagoya, K. Kushiya, and O. Yamase Sol. Energy Mater. Sol. Cells 75 2007 179
9. A. Hongsingthong, I.A. Yunaz, S. Miyajima, and M. Konagai Sol. Energy Mater. Sol. Cells 95 2007 171
10. S. Fay, J. Steinhauser, N. Oliveira, E. Vallat-Sauvain, and C. Ballif Thin Solid Films 515 2007 8558
11. J. Steinhauser, S. Fay, N. Oliveira, E. Vallat-Sauvain, and C. Ballif Appl. Phys. Lett. 90 2007 142107
12. S.M. Smith, and H.B. Schlegel Chem. Mater. 15 2003 162
13. K. Maejima, and Sz. Fujita J. Cryst. Growth 293 2006 305
14. K. Maejima, and Sz. Fujita Jpn. J. Appl. Phys. 46 2007 7885
15. Y.S. Kim, and Y.S. Won Bull. Korean Chem. Soc. 30 2009 1573
16. S. Nicolay, S. Fay, and C. Ballif Cryst. Growth Des. 9 2009 4957
17. S. Fay, U. Kroll, C. Bucher, E. Vallat-Sauvain, and A. Shah Sol. Energy Mater. Sol. Cells 86 2005 385
18. G.E. Coates, M.L.H. Green, and K. Wada Organometallic Compounds vol. 1 1968 Methuen London 130
19. T.R. Crompton International Series of Monographs in Analytical Chemistry vol. 31 1968 Pergamon Oxford 322
20. B.H. Munk, and H.B. Schlegel Chem. Mater. 18 2006 1878
21. K. Maejima, and Sz. Fujita Phys. Stat. Sol. c 3 2006 1022
22. M.E. Coltrin, R.J. Kee, and J.A. Miller J. Electrochem. Soc. 131 1984 425
23. M.E. Coltrin, R.J. Kee, and J.A. Miller J. Electrochem. Soc. 133 1986 1206
24. M.E. Coltrin, R.J. Kee, and G.H. Evans J. Electrochem. Soc. 136 1989 819
25. D. Sengupta, S. Mazumder, W. Kuykendall, and S.A. Lowry J. Cryst. Growth 279 2005 369
26. A. Hirako, K. Kusakabe, and K. Ohkawa Jpn. J. Appl. Phys. 44 2005 874
27. T. Matsui, H. Sai, K. Saito, and M. Kondo Jpn. J. Appl. Phys. 51 2012 10NB04
28. T. Matsui, H. Sai, K. Saito, and M. Kondo Prog. Photovolt. Res. Appl. 21 2013 1363