SCOPUS 정보 검색 플랫폼

Volumn 51, Issue 10 PART 2, 2012, Pages

Optimization of gas-switching sequence for InGaAs/GaAsP superlattice structures using in situ wafer curvature monitoring

(5) Ma, ShaoJun a Sodabanlu, Hassanet b Watanabe, Kentaroh b Sugiyama, Masakazu a Nakano, Yoshiaki a,b

a UNIVERSITY OF TOKYO (Japan)

b UNIVERSITY OF TOKYO (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE STRAIN; CURVATURE MEASUREMENT; GAAS; HIGH-ACCURACY; HYDROGEN PURGE; INSERTION LAYERS; METAL-ORGANIC VAPOR PHASE EPITAXY; SUPER-LATTICE STRUCTURES; SURFACE ATOMS; WAFER CURVATURE;

GALLIUM ARSENIDE; GROWTH KINETICS; METALLORGANIC VAPOR PHASE EPITAXY; OPTIMIZATION; SEMICONDUCTING GALLIUM; SEMICONDUCTING INDIUM; WELLS;

CURVE FITTING;

EID: 84869104855 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.51.10ND09 Document Type: Article

Times cited : (11)

References (11)

1
- 0035254391
- P. K. Chiang, C. L. Chu, Y. C. M. Yeh, P. Iles, and F. Ho: Sol. Energy Mater. Sol. Cells 66 (2001) 615
- (2001) Sol. Energy Mater. Sol. Cells , vol.66 , pp. 615
- Chiang, P.K.¹ Chu, C.L.² Yeh, Y.C.M.³ Iles, P.⁴ Ho, F.⁵

2
- 20444490856
- M. Yamaguchi, T. Takamoto, K. Araki, and N. Ekins-Daukes: Sol. Energy 79 (2005) 78
- (2005) Sol. Energy , vol.79 , pp. 78
- Yamaguchi, M.¹ Takamoto, T.² Araki, K.³ Ekins-Daukes, N.⁴

3
- 33646572866
- M. Mazzer, K. W. J. Barnham, I. M. Ballard, A. Bessiere, A. Ioannides, D. C. Johnson, M. C. Lynch, T. N. D. Tibbits, J. S. Roberts, G. Hill, and C Calder: Thin Solid Films 511-512 (2006) 76
- (2006) Thin Solid Films , vol.511-512 , pp. 76
- Mazzer, M.¹ Barnham, K.W.J.² Ballard, I.M.³ Bessiere, A.⁴ Ioannides, A.⁵ Johnson, D.C.⁶ Lynch, M.C.⁷ Tibbits, T.N.D.⁸ Roberts, J.S.⁹ Hill, G.¹⁰ Calder, C.¹¹

4
- 0000877862
- Y. Liu and X.-R. Xiao: J. Phys. Chem. B 103 (1999) 10421
- (1999) J. Phys. Chem. , vol.B 103 , pp. 10421
- Liu, Y.¹ Xiao, X.-R.²

5
- 84869109818
- paper 003383
- Y. Wang, Y. Wen, M. Sugiyama, and Y. Nakano: Proc. 35th IEEE Photovoltaic Specialists Conf., 2010, paper 003383
- (2010) Proc. 35th IEEE Photovoltaic Specialists Conf.
- Wang, Y.¹ Wen, Y.² Sugiyama, M.³ Nakano, Y.⁴

6
- 84869100371
- paper 002674
- Y. Wang, Y. Wen, H. Sodabanlu, K. Watanabe, M. Sugiyama, and Y Nakano: Proc. 37th IEEE Photovoltaic Specialists Conf., 2011, paper 002674
- (2011) Proc. 37th IEEE Photovoltaic Specialists Conf.
- Wang, Y.¹ Wen, Y.² Sodabanlu, H.³ Watanabe, K.⁴ Sugiyama, M.⁵ Nakano, Y.⁶

7
- 78649290641
- A. Krost, C. Berger, J. Bläsing, A. Franke, T. Hempel, A. Dadgar, and J Christen: Appl. Phys. Lett. 97 (2010) 181105
- (2010) Appl. Phys. Lett. , vol.97 , pp. 181105
- Krost, A.¹ Berger, C.² Bläsing, J.³ Franke, A.⁴ Hempel, T.⁵ Dadgar, A.⁶ Christen, J.⁷

8
- 79551688642
- M. Sugiyama, K. Sugita, Y. Wang, and Y. Nakano: J. Cryst. Growth 315 (2011) 1
- (2011) J. Cryst. Growth , vol.315 , pp. 1
- Sugiyama, M.¹ Sugita, K.² Wang, Y.³ Nakano, Y.⁴

9
- 84859350056
- S. Ma, H. Sodabanlu, K. Watanabe, M. Sugiyama, and Y. Nakano: J. Appl Phys. 110 (2011) 113501
- (2011) J. Appl Phys. , vol.110 , pp. 113501
- Ma, S.¹ Sodabanlu, H.² Watanabe, K.³ Sugiyama, M.⁴ Nakano, Y.⁵

10
- 0029632942
- S. Lutgen, T. Marschner, W. Stolz, E. O. Göbel, and L. Tapfer: J. Cryst Growth 152 (1995) 1
- (1995) J. Cryst Growth , vol.152 , pp. 1
- Lutgen, S.¹ Marschner, T.² Stolz, W.³ Göbel, E.O.⁴ Tapfer, L.⁵

11
- 0000420099
- N. Grandjean, J. Massies, and M. Leroux: Phys. Rev. B 53 (1996) 998
- (1996) Phys. Rev. , vol.B 53 , pp. 998
- Grandjean, N.¹ Massies, J.² Leroux, M.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.