Chemical vapor reactions of ZnO growth by metal-organic vapor phase epitaxy

Journal of Crystal Growth

Volumn 293, Issue 2, 2006, Pages 305-310

  Maejima, K ^a   Fujita, S ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

A1. Chemical vapor reaction; A1. FT IR; A3. Metalorganic vapor phase epitaxy; B1. ZnO

Indexed keywords

DISSOCIATION; ETHYLENE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDRIDES; NITROGEN OXIDES; VAPOR PHASE EPITAXY;

A1. CHEMICAL VAPOR REACTION; A1. FT-IR; A3. METALORGANIC VAPOR PHASE EPITAXY; B1. ZNO;

ZINC OXIDE;

EID: 33746455138     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.04.117     Document Type: Article

References (21)

1. Tsukazaki A., Ohtomo A., Onuma T., Ohtani M., Makino T., Sumiya M., Ohtani K., Chichibu S.F., Fuke S., Segawa Y., Ohno H., Koinuma H., and Kawasaki M. Nature Mater. 4 (2005) 42
2. Tsukazaki A., Kubota M., Ohtomo A., Onuma T., Ohtani K., Ohno H., Chichibu S.F., and Kawasaki M. Jpn. J. Appl. Phys. 44 (2005) L643
3. Kim S.W., Fujita Sz., and Fujita Sg. Appl. Phys. Lett. 81 (2002) 5036
4. Kim S.W., Fujita Sz., and Fujita Sg. Appl. Phys. Lett. 86 (2005) 153119
5. Saitoh H., Satoh M., Tanaka N., Ueda Y., and Ohshio S. Jpn. J. Appl. Phys. 38 (1999) 6873
6. Maejima K., Ueda M., Fujita Sz., and Fujita Sg. Jpn. J. Appl. Phys. 42 (2003) 2600
7. Smith T.P., McLean H., Smith D.J., and Davis R.F. J. Crystal Growth 265 (2004) 390
8. Nakamura A., Shigemori S., Shimizu Y., Aoki T., and Temmyo J. Jpn. J. Appl. Phys. 43 (2004) 7672
9. Li H., Liu H., Wang J., Yao S., Cheng X., and Boughton R.I. Mater. Lett. 58 (2004) 3630
10. Pagni O., James G.R., and Leitch A.W.R. Phys. Stat. Solidi (c) 1 (2004) 864
11. Fu Z., Lin B., and Zu J. Thin Solid Films 402 (2002) 302
12. Saito K., Yamamoto Y., Matsuda A., Izumi S., Uchino T., Ishida K., and Takahashi K. Phys. Stat. Solidi (b) 229 (2002) 925
13. Domrachev G.A., Zhuk B.V., Zinovijeva N.K., Kuleshov V.G., Lomakova I.V., and Krasnov Y.N. Inorg. Chim. Acta 45 (1980) L233
14. NIST Chemistry webbook, 〈http://webbook.nist.gov/chemistry/〉.
15. Sosnowsky G., and Brown J.H. Chem. Rev. 66 (1966) 529
16. G.E. Coates, M.L.H. Green, K. Wada, Organometallic Compounds, vol. 1, Methuen, London, 1968, pp. 130-137.
17. C.H. Bamford, D.M. Newitt, J. Chem. Soc. (1946) 688.
18. T.R. Crompton, Analysis of Organoaluminium and Organozinc Compounds, International Series of Monographs in Analytical Chemistry, vol. 31, Oxford, New York, 1968, pp. 315-324.
19. H.W. Thompson, N.S. Kelland, J. Chem. Soc. (1933) 756.
20. Ashby E.C. Ann. N.Y. Acad. Sci. 159 (1969) 131
21. Smith S.M., and Schlegel H.B. Chem. Mater. 15 (2003) 162