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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 32, Issue 2, 2014, Pages

Fabrication of polymer antireflection structures by injection molding using ordered anodic porous alumina mold

(4) Yanagishita, Takashi a Masui, Mikio b Ikegawa, Naoto b Masuda, Hideki a

a TOKYO METROPOLITAN UNIVERSITY (Japan)

b PANASONIC CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INJECTION MOLDING; MOLDS; POLYCARBONATES; POLYMERS; ALUMINA; MOLDING; TRENCHING;

ANODIC POROUS ALUMINA; ANTI-REFLECTION STRUCTURES; ORDERED ARRAY; POLYCARBONATE PLATES;

TRENCHING; INJECTION MOLDING;

EID: 84899016289 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.4868030 Document Type: Article

Times cited : (17)

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