메뉴 건너뛰기




Volumn 1572, Issue , 2013, Pages 33-38

High-density feedthrough technology for hermetic biomedical micropackaging

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; BIOCOMPATIBILITY; CERAMIC MATERIALS; HELIUM; INTERFACES (MATERIALS); IONIC CONDUCTION; PLATINUM; SEALING (FINISHING);

EID: 84897699021     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/opl.2013.735     Document Type: Conference Paper
Times cited : (4)

References (9)
  • 4
    • 0042564493 scopus 로고    scopus 로고
    • Micromachining and Microfabrication Process Technology VIII, J. Yasaitis, M. Perez-Maher, and J. Karam, Eds.
    • K. Najafi, in Micromachining and Microfabrication Process Technology VIII, J. Yasaitis, M. Perez-Maher, and J. Karam, Eds., Proceedings of the SPIE, 4979, 1-19, (2003).
    • (2003) Proceedings of the SPIE , vol.4979 , pp. 1-19
    • Najafi, K.1
  • 7
    • 62649137024 scopus 로고    scopus 로고
    • S. Kim, R. Bhandari, M. Klein, S. Nagi, L. Rieth, P. Tathireddy, M. Toepper, H. Oppermann, and F. Solzbacher, 11, 453-466, (2009)
    • S. Kim, R. Bhandari, M. Klein, S. Nagi, L. Rieth, P. Tathireddy, M. Toepper, H. Oppermann, and F. Solzbacher, 11, 453-466, (2009).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.