Reliability overview of RF MEMS devices and circuits

Conference Proceedings - 33rd European Microwave Conference, EuMC 2003

Volumn 1, Issue , 2003, Pages 37-40

  Melle, S ^a   Flourensl, F ^a   Dubuc, D ^a   Grenier, K ^a   Pons, P ^a   Pressecq, F ^b   Kuchenbecker, J ^b   Muraro, J L ^c   Baryl, L ^a   Plana, R ^a  

^a LAAS CNRS   (France)

^b CNES   (France)

^c THALES ALENIA SPACE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES;

RELIABILITY PERFORMANCE; RELIABILITY PROPERTIES; RF-MEMS; TECHNOLOGY AND DESIGNS; TEMPERATURE DEPENDANCE;

RELIABILITY;

EID: 84897476211     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2003.1262212     Document Type: Conference Paper

References (21)

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