Application of three-dimensionally area-selective atomic layer deposition for selectively coating the vertical surfaces of standing nanopillars

Scientific Reports

Volumn 4, Issue , 2014, Pages

  Dong, Wenjing ^a   Zhang, Kenan ^a   Zhang, Yun ^a   Wei, Tiaoxing ^a   Sun, Yan ^a   Chen, Xin ^a   Dai, Ning ^a  

^a SHANGHAI INSTITUTE OF TECHNICAL PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84897033802     PISSN: None     EISSN: 20452322     Source Type: Journal    
DOI: 10.1038/srep04458     Document Type: Article

References (32)

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