Normally-closed electrostatic microvalve fabricated using exclusively soft-lithographic techniques and operated with portable electronics

Journal of Microelectromechanical Systems

Volumn 22, Issue 6, 2013, Pages 1251-1253

  Tice, Joshua D ^a   Rosheck, John B ^a   Hamlin, Christopher D ^b,c   Apblett, Christopher A ^b,c   Kenis, Paul J A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c University of New Mexico   (United States)

Author keywords

Carbon nanotubes; Electrostatic microvalve; Poly (dimethylsiloxane); Soft lithography

Indexed keywords

MICRO VALVES; PLASMA BONDING; PORTABLE ELECTRONICS; REPLICA MOLDING; SINGLE CHIPS; SOFT-LITHOGRAPHIC TECHNIQUES; SOFT-LITHOGRAPHY;

CARBON NANOTUBES; ELECTROSTATICS; LITHOGRAPHY;

VALVES (MECHANICAL);

EID: 84896711272     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2282711     Document Type: Article

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