Design considerations for elastomeric normally closed microfluidic valves

Sensors and Actuators, B: Chemical

Volumn 160, Issue 1, 2011, Pages 1216-1223

  Mohan, Ritika ^a   Schudel, Benjamin R ^a   Desai, Amit V ^a   Yearsley, Joshua D ^c   Apblett, Christopher A ^b,c   Kenis, Paul J A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c University of New Mexico   (United States)

Author keywords

Actuation pressure; Hysteresis; Microvalves; Normally closed valves; Soft lithography

Indexed keywords

BIOLOGICAL PROCESS; CRYSTALLIZATION SCREENING; DESIGN CONSIDERATIONS; EXPERIMENTAL CHARACTERIZATION; EXPERIMENTAL OBSERVATION; FLUID CHANNELS; FLUID LAYER; GEOMETRICAL PARAMETERS; LONG DURATION; LOWER PRESSURES; MEMBRANE THICKNESS; MICRO VALVES; MICRO-FLUIDIC DEVICES; MICROFLUIDIC VALVES; ON CHIPS; PARALLEL NETWORK; PARALLEL OPERATIONS; PNEUMATIC ACTUATION; RELIABLE OPERATION; SHARP CORNERS; SOFT LITHOGRAPHY; VALVE GEOMETRY; VALVE OPERATION;

ADHESION; CHEMICAL ANALYSIS; DESIGN; FLUIDIC DEVICES; FLUIDS; GEOMETRY; HYSTERESIS; MICROFLUIDICS; PNEUMATICS;

VALVES (MECHANICAL);

EID: 81155128127     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.09.051     Document Type: Article

References (32)

1. R.G. Blazej, P. Kumaresan, and R.A. Mathies Microfabricated bioprocessor for integrated nanoliter-scale Sanger DNA sequencing Proceedings of the National Academy of Sciences of the United States of America 103 2006 7240 7245
2. C.-C. Lee, G. Sui, A. Elizarov, C.J. Shu, Y.-S. Shin, A.N. Dooley, J. Huang, A. Daridon, P. Wyatt, D. Stout, H.C. Kolb, O.N. Witte, N. Satyamurthy, J.R. Heath, M.E. Phelps, S.R. Quake, and H.-R. Tseng Multistep synthesis of a radiolabeled imaging probe using integrated microfluidics Science 310 2005 1793 1796
3. R. Pal, M. Yang, R. Lin, B.N. Johnson, N. Srivastava, S.Z. Razzacki, K.J. Chomistek, D.C. Heldsinger, R.M. Haque, V.M. Ugaz, P.K. Thwar, Z. Chen, K. Alfano, M.B. Yim, M. Krishnan, A.O. Fuller, R.G. Larson, D.T. Burke, and M.A. Burns An integrated microfluidic device for influenza and other genetic analyses Lab on a Chip 5 2005 1024 1032
4. C.B. Rohde, F. Zeng, R. Gonzalez-Rubio, M. Angel, and M.F. Yanik Microfluidic system for on-chip high-throughput whole-animal sorting and screening at subcellular resolution Proceedings of the National Academy of Sciences of the United States of America 104 2007 13891 13895
5. G.T.A. Kovacs Micromachined Transducers Sourcebook 1998 McGraw-Hill New York
6. K. Oh, W, and C.H. Ahn A review of microvalves Journal of Micromechanics and Microengineering 16 2006 R13
7. M.A. Unger, H.-P. Chou, T. Thorsen, A. Scherer, and S.R. Quake Monolithic microfabricated valves and pumps by multilayer soft lithography Science 288 2000 113 116
8. P.L. Skousen Valve Handbook 1997 McGraw-Hill Professional Publishing New York
9. J.S. Go, and S. Shoji A disposable, dead volume-free and leak-free in-plane PDMS microvalve Sensors and Actuators A: Physical 114 2004 438 444
10. S. Lee, W. Jeong, and D.J. Beebe Microfluidic valve with cored glass microneedle for microinjection Lab on a Chip 3 2003 164 167
11. B.R. Schudel, C.J. Choi, B.T. Cunningham, and P.J.A. Kenis Microfluidic chip for combinatorial mixing and screening of assays Lab on a Chip 9 2009 1676 1680
12. B.R. Schudel, M. Tanyeri, A. Mukherjee, C.M. Schroeder, and P.J.A. Kenis Multiplexed detection of nucleic acids in a combinatorial screening chip Lab on a Chip 11 2011 1916 1923
13. E.P. Kartalov, A. Scherer, S.R. Quake, C.R. Taylor, and W.F. Anderson Experimentally validated quantitative linear model for the device physics of elastomeric microfluidic valves Journal of Applied Physics 101 2007
14. V. Studer, G. Hang, A. Pandolfi, M. Ortiz, W. French Anderson, and S.R. Quake Scaling properties of a low-actuation pressure microfluidic valve Journal of Applied Physics 95 2004 393 398
15. W.H. Grover, R.H.C. Ivester, E.C. Jensen, and R.A. Mathies Development and multiplexed control of latching pneumatic valves using microfluidic logical structures Lab on a Chip 6 2006 623 631
16. H. Zhao, K. Stanley, Q.M. Jonathan Wu, and E. Czyzewska Structure and characterization of a planar normally closed bulk-micromachined piezoelectric valve for fuel cell applications Sensors and Actuators A: Physical 120 2005 134 141
17. B. Bae, J. Han, R.I. Masel, and M.A. Shannon A bidirectional electrostatic microvalve with microsecond switching performance Journal of Microelectromechanical Systems 16 2007 1461 1471
18. D. Irimia, and M. Toner Cell handling using microstructured membranes Lab on a Chip 6 2006 345 352
19. K. Hosokawa, and R. Maeda A pneumatically-actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer technique Journal of Micromechanics and Microengineering 10 2000 415 420
20. Y.-N. Yang, S.-K. Hsiung, and G.-B. Lee A pneumatic micropump incorporated with a normally closed valve capable of generating a high pumping rate and a high back pressure Microfluidics and Nanofluidics 6 2009 823 833
21. W.H. Grover, A.M. Skelley, C.N. Liu, E.T. Lagally, and R.A. Mathies Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices Sensors and Actuators B: Chemical 89 2003 315 323
22. G.S. Fiorini, and D.T. Chiu Disposable microfluidic devices: fabrication, function, and application BioTechniques 38 2005 429 446
23. J.S. Kuo, and D.T. Chiu Disposable microfluidic substrates: transitioning from the research laboratory into the clinic Lab on a Chip 11 2011 2656 2665
24. S. Timoshenko, and S. Woinowsky-Krieger Theory of Plates and Shells 2nd 1959 McGraw-Hill Book Company New York
25. C.H. Mastrangelo, and C.H. Hsu Mechanical stability and adhesion of microstructures under capillary forces. Part II. Experiments Journal of Microelectromechanical Systems 2 1993 44 55
26. A.N. Gent, and G.R. Hamed Peel mechanics The Journal of Adhesion 7 1975 91 95
27. K. Kendall Thin-film peeling-the elastic term Journal of Physics D: Applied Physics 8 1975 1449
28. S. Timoshenko Strength of Materials 3rd ed. 1983 Krieger Publishing Company
29. Y. Xia, and G.M. Whitesides Soft lithography Angewandte Chemie International Edition 37 1998 550 575
30. H. Hillborg, J.F. Ankner, U.W. Gedde, G.D. Smith, H.K. Yasuda, and K. Wikström Crosslinked polydimethylsiloxane exposed to oxygen plasma studied by neutron reflectometry and other surface specific techniques Polymer 41 2000 6851 6863
31. P.A. Willis, F. Greer, M.C. Lee, J.A. Smith, V.E. White, F.J. Grunthaner, J.J. Sprague, and J.P. Rolland Monolithic photolithographically patterned Fluorocur™ PFPE membrane valves and pumps for in situ planetary exploration Lab on a Chip 8 2008 1024 1026
32. L.P. Demejo, D.S. Rlmal, J.H. Chen, and R.C. Bowen Time dependent adhesion induced phenomena: the flow of a compliant silicone-polyester copolymer substrate over rigid micrometer size gold and polystyrene particles The Journal of Adhesion 48 1995 47 56