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Volumn 13, Issue 12, 2013, Pages 7806-7813

Nanotexturing process on microtextured surfaces of silicon solar cells by sf6/o2 reactive ion etching

Author keywords

Black Silicon; Plasma Nanotexturing; Reactive Ion Etching (Rie); Silicon Solar Cell

Indexed keywords

BLACK SILICON; CHEMICAL WET ETCHING PROCESS; MICRO-TEXTURED SURFACES; PLASMA NANOTEXTURING; SINGLE CRYSTALLINE SILICON; SURFACE NANOSTRUCTURE; SURFACE RECOMBINATION PROCESS; VISIBLE LIGHT REGION;

EID: 84892696626     PISSN: 15334880     EISSN: 15334899     Source Type: Journal    
DOI: 10.1166/jnn.2013.8119     Document Type: Article
Times cited : (7)

References (27)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.