Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 1324-1327

  Choi, Jungwook ^a   Pyo, Soonjae ^a   Lee, Jae Ik ^a   Kim, Jongbaeg ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNED CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION PROCESS; INTENSITY RATIO; MICRO RAMAN SPECTROSCOPY; MICRO-MECHANICAL; MICROFABRICATED; SCANNING ELECTRON MICROSCOPE; SPRING STIFFNESS;

ALIGNMENT; CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; LOADING; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY;

MEMS;

EID: 84860475780     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170402     Document Type: Conference Paper

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