Fabrication of stress-induced self-rolled metal/insulator bifilm microtube with micromesh walls

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Volumn , Issue , 2013, Pages 124-127

  Lee, K N ^a   Seo, Y T ^a,b   Kim, J M ^c   Kim, Y K ^b   Lee, M H ^a   Seong, W K ^a  

^a Korea Electronic Technology Institute (KETI)   (South Korea)

^b Seoul National University   (South Korea)

^c Chonbuk National University   (South Korea)

Author keywords

Metal insulator bifilms; Micromesh; Microtube; Self rolling; Thin film stress

Indexed keywords

BIFILMS; MICROMESH; MICROTUBE; SELF ROLLINGS; THIN-FILM STRESS;

ACTUATORS; ELECTRIC PROPERTIES; MICROSYSTEMS; SILICON OXIDES; SOLID-STATE SENSORS;

ROLLING;

EID: 84891666424     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Transducers.2013.6626717     Document Type: Conference Paper

References (21)

1. O. G. Schmidt, N. Schmarje, C.Deneke, C. Müller, and NY Jin-Phillipp, "Three-Dimensional Nano-objects Evolving from a Two-Dimensional Layer Technology", Adv. Mater. 2001, 13, 756
2. E. J. Smith, W. Xi, D. Makarov, I. Mönch, S. Harazim, V. A. B. Quiñones, C. K. Schmidt, Y. Mei, S. Sanchez, O. G. Schmidt. "Lab-in-A-tube: ultracompact components for on-chip capture and detection of individual micro-/nanoorganisms", Lab on Chip, 2012, 12, 1917-1931
3. V. Yakovlevich Prinz, V. Alexandrovich Seleznev, A. Victorovich Prinz, A. Vladimirovich Kopylov, "3D heterostructures and systems for novel MEMS/NEMS", Science and Technology of Advanced Materials 2009, 10, 034502.
4. F. Cavallo, R. Songmuang, O. Schmidt, "Fabrication and electrical characterization of Si-based rolled-up microtubes", Applied Physics Letters 2008, 93, 143113
5. I. Mönch, J. Schumann, M. Stockmann, K. F. Arndt, O. G. Schmidt, "Multifunctional nanomembranes self-assembled into compact rolled-up sensor-actuator devices", Smart Materials and Structures 2011, 20, 085016.
6. I. Monch, D. Makarov, R. Koseva, L. Baraban, D. Karnaushenko, C. Kaiser, K. F. Arndt, O. G. Schmidt, "Rolled-Up Magnetic Sensor: Nanomembrane Architecture for In-Flow Detection of Magnetic Objects", ACS nano 2011, 5, 7436-7442.
7. G. Huang, Y. Mei, D. J. Thurmer, E. Coric, O. G. Schmidt, "Rolled-up transparent microtubes as two-dimensionally confined culture scaffolds of individual yeast cells", Lab Chip 2008, 9, 263-268.
8. S. Schulze, G. Huang, M. Krause, D. Aubyn, V. A. B. Quiñones, C. K. Schmidt, Y. Mei, O. G. Schmidt, "Morphological Differentiation of Neurons on Microtopographic Substrates Fabricated by Rolled?Up Nanotechnology", Advanced Engineering Materials 2010, 12, B558-B564.
9. A. A. Solovev, S. Sanchez, O. G. Schmidt, "Tunable catalytic tubular micro-pumps operating at low concentrations of hydrogen peroxide", Physical Chemistry Chemical Physics 2011, 13, 10131-10135.
10. V. Y. Prinz, "A new concept in fabricating building blocks for nanoelectronic and nanomechanic devices", Microelectronic engineering 2003, 69, 466-475.
11. C. Giordano, M. Todaro, M. Palumbo, L. Blasi, V. Errico, A. Salhi, A. Qualtieri, G. Gigli, A. Passaseo, M. De Vittorio, "Hybrid polymer/semiconductor microtubes: A new fabrication approach", Microelectronic engineering 2008, 85, 1170-1172.
12. P. O. Vaccaro, K. Kubota, T. Aida, "Strain-driven self-positioning of micromachined structures", Applied Physics Letters 2001, 78, 2852-2854.
13. Y. Mei, G. Huang, A. A. Solovev, E. B. Ureña, I. Mönch, F. Ding, T. Reindl, R. K. Y. Fu, P. K. Chu, O. G. Schmidt, "Versatile Approach for Integrative and Functionalized Tubes by Strain Engineering of Nanomembranes on Polymers", Advanced Materials 2008, 20, 4085-4090.
14. Y. V. Nastaushev, V. Y. Prinz, S. Svitasheva, "A technique for fabricating Au/Ti micro-and nanotubes", Nanotechnology 2005, 16, 908.
15. V. Luchnikov, O. Sydorenko, M. Stamm, "Self-Rolled Polymer and Composite Polymer/Metal Micro-and Nanotubes with Patterned Inner Walls", Advanced Materials 2005, 17, 1177-1182.
16. K.N. Lee, Y.T. Seo, J.M. Kim, Y.K. Kim, M.H. Lee, W.K. Seong, "Stress-induced self-rolled metal/insulator bifilm microtube with micromesh walls", Journal of Micromech. and Microeng. 2013, 23, 015003
17. K. N. Lee, S. W. Jung, K. S. Shin, W. H. Kim, M. H. Lee, W. K. Seong, "Fabrication of Suspended Silicon Nanowire Arrays", small 2008, 4, 642-648.
18. K. N. Lee, D. S. Lee, S. W. Jung, Y. H. Jang, Y. K. Kim, W. K. Seong, "A high-temperature MEMS heater using suspended silicon structures", Journal of Micromech. and Microeng. 2009, 19, 115011
19. Y. Fu, J. Luo, S. Ong, S. Zhang, A. Flewitt, W. Milne, "A shape memory microcage of TiNi/DLC films for biological applications", Journal of Micromech. and Microeng. 2008, 18, 035026.
20. M. Kurihara, Y. Heo, K. Kuribayashi-Shigetomi, S. Takeuchi, "3D laser lithography combined with Parylene coating for the rapid fabrication of 3D microstructures", IEEE, 2012, pp. 196-199.
21. Y. Liu, K. Du, I. Wathuthanthri, W. Xu, C. H. Choi, "3-D nanofabrication using nanostructured photoresist film as free-standing appliqué", IEEE, 2012, pp. 192-195.