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Volumn 52, Issue 3, 2013, Pages 371-380

Structure, mechanical, and tribological properties of MoS2/a-C:H composite films

Author keywords

Ar CH4 ratio; MoS2 a C:H film; Tribological properties

Indexed keywords

AS-DEPOSITED FILMS; HYDROGENATED AMORPHOUS CARBON (A-C:H); MEDIUM FREQUENCIES; MOLYBDENUM DISULFIDE; NANOSTRUCTURED FILMS; SOLID LUBRICATING FILMS; TRIBOLOGICAL PROPERTIES; UNBALANCED MAGNETRON SPUTTERING;

EID: 84890105300     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-013-0216-9     Document Type: Article
Times cited : (35)

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