Paramagnetic properties and hydrogen-related structural relaxation effects in magnetron-sputtered a-C:H thin films

Journal of Non-Crystalline Solids

Volumn 299-302, Issue PART 2, 2002, Pages 846-851

  Fanchini, G ^a   Tagliaferro, A ^a   Popescu, B ^b   Davis, E A ^b  

^a POLITECNICO DI TORINO   (Italy)

^b UNIVERSITY OF LEICESTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CARBON; CHEMICAL BONDS; HYDROGEN; MAGNETRON SPUTTERING; PARAMAGNETIC RESONANCE;

STRUCTURAL RELAXATION;

THIN FILMS;

EID: 0036531820     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)01103-6     Document Type: Article

References (12)