Barrier Layer Technology for Flexible Displays

Flexible Flat Panel Displays

Volumn , Issue , 2005, Pages 57-77

  Graff, Gordon L ^a   Burrows, Paul E ^a   Williford, Rick E ^a   Praino, Robert F ^b  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b Vitex Systems   (United States)

Author keywords

Fickian; Liquid crystal displays (LCDs); OLED encapsulation; Organic light emitting devices (OLEDs); OTR (oxygen permeation rates); Polymer; Thin film barrier layers; Thin film vapor barriers; Water vapor permeation rates (WVTR)

Indexed keywords

EID: 84889406208     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/0470870508.ch4     Document Type: Chapter

References (47)

1. Affinito, J. D., Martin, P., Gross, M., Coronado, C. and Greenwell, E. (1995) Vacuum deposited polymer/metal multilayer films for optical applications. Thin Solid Films 270, 43.
2. Affinito, J. D., Gross, M. E., Coronado, C. A., Dunham, G. C. and Martin, P. M. (1996a) High rate vacuum deposition of polymer electrolytes. Journal of Vacuum Science Technology A 14(3), 733.
3. Affinito, J. D., Gross, M. E., Coronado, C. A., Graff, G. L., Greenwell, E. N. and Martin, P. M. (1996b) A new method for fabricating transparent barrier layers. Thin Solid Films 290/91, 63-67.
4. Affinito, J. D., Eufinger, S., Gross, M. E., Graff, G. L. and Martin, P. M. (1997) PML/oxide/PML barrier layer performance differences arising from use of UVor electron beam polymerization of the PML layers. Thin Solid Films 308/9, 19-25.
5. Anon (1996) Permeability and other Film Properties, Plastics Design Library, Norwich, NY.
6. Ash, R., Barrer, R. M. and Palmer, D. G. (1965) Diffusion in multiple laminates. British Journal of Applied Physics 16, 873-884.
7. Aziz, H., Popovic, Z., Tripp, C. P., Hu, N. -H., Hor, A.-M. and Gu, X. (1988) Degradation processes at the cathode/organic interface in organic light emitting devices with Mg:Ag cathodes. Applied Physics Letters 72(21), 2642.
8. Baxter, I. (1993) Advanced resistance deposition technology for productive roll coating. 36th Annual Technical Conference Proceedings, Society of Vacuum Coaters, 197.
9. Brandrup, J. and Immergut, E. H. (1989) Polymer Handbook, 3rd edn, John Wiley & Sons, Inc., New York.
10. Burger, L. L. and Morgan, L. G. (1980) Tritium Safety in Fusion Reactor Designs, PNNL Report, June.
11. Burrows, P. E., Bulovic,V., Forrest, S. R., Sapochak, L. S., McCarty, D. M. and Thompson, M. E. (1994) Reliability and degradation of organic light emitting devices. Applied Physics Letters 65(23), 2922.
12. Chatham, H. (1996) Oxygen diffusion barrier properties of transparent oxide coatings on polymeric substrates. Surfaces and Coatings Technology 78, 1.
13. Crank, J. (1975) The Mathematics of Diffusion, Claredon Press, Oxford.
14. da Silva Sobrinho, A. S., Czeremuszkin, G., Latreche, M. and Wertheimer, M. R. (2000) Defectpermeation correlation for ultrathin transparent barrier coatings on polymers. Journal of Vacuum Science Technology A 18(1), 149.
15. Decker, W. and Henry, B. (2002) Basic principles of thin film barrier coatings. 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, 492-502.
16. Dunkel, R. (2004) Method of measuring ultra-low water vapor permeation for OLED displays. Flexible Displays and Microelectronics Conference, February, 10-12.
17. Erlat, A. G.,Wang, B. -C., Spontak, R. J., Tropsha, Y., Mar, K. D., Montgomery, D. B. and Vogler, E. A. (2000) Morphology and gas barrier properties of thin SiOx coatings on polycarbonate: correlations with plasma-enhanced chemical vapor deposition conditions. Journal of Materials Research 15(3), 704.
18. Erlat, A. G., Spontak, R. J., Clarke, R. P., Robinson, T. C., Haaland, P. D., Tropsha, Y., Harvey, N. G. and Vogler, E. A. (1999) SiOx gas barrier coatings on polymer substrates: morphology and gas transport considerations. Journal of Physical Chemistry B 103, 6047.
19. Erlat, A. G., Henry, B. M., Ingram, J. J., Mountain, D. B., McGuigan, A., Howson, R. P., Grovenor, C. R. M., Briggs, G. A. D. and Tsukahara, Y. (2001) Characterisation of aluminium oxynitride gas barrier films. Thin Solid Films 388, 78.
20. Erlat, A. G., Henry, B. M., Grovenor, C. R. M., Briggs, A. G. D., Chater R. J. and Tsukahara, Y. (2004) Mechanism of water vapor transport through PET/AlOxNy gas barrier films. Journal of Physical Chemistry B 108, 883-890.
21. Graff, G. L., Williford, R. E. and Burrows, P. E. (2004) Mechanisms of vapor permeation through multilayer barrier films: lag time versus equilibrium permeation. Journal of Applied Physics, 96(4), 1840.
22. Gu, G., Burrows, P. E., Venkatesh, S. and Forrest, S. R. (1997) Vacuum-deposited, nonpolymeric flexible organic light-emitting devices. Optics Letters 22(3), 172.
23. Gustaffson, G., Treacy, G. M., Cao, Y., Klavetter, F., Colaneri, N. and Heeger, A. J. (1992) Flexible light-emitting diodes made from soluble conducting polymers. Nature 357, 477.
24. Hanika, H., Langowski, H.-C., and Peukert, W. (2003) Simulation and verification of defect-dominated permeation mechanisms in multiple structures of inorganic and polymeric barrier layers. 46th Annual Technical Conference Proceedings, Society of Vacuum Coaters, 592-599.
25. Hanika, H., Langowski, H.-C. and Moosheimer, U. (2002) Layer defects and the synergetic effect between inorganic and organic barrier layers. 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, 519-24.
26. Harvey, T. B. III, Shi, S. Q. and So, F. (1997) Passivation of organic devices, US Patent 5,686,360.
27. Harvey, T. B. III, Shi, S. Q. and So, F. (1998) Passivated organic device having alternating layers of polymer and dielectric, US Patent 5,757,126.
28. Henry, B. M., Erlat, A. G., McGuigan, A., Grovenor, C. R. M., Briggs, G. A. D., Tsukahara, Y., Miyamoto, T., Noguchi, N. and Niijima, T. (2001) Characterization of transparent aluminium oxide and indium tin oxide layers on polymer substrates. Thin Solid Films 382, 194.
29. Jamieson, E. H. H. and Windle, A. H. (1983) Structure and oxygen-barrier properties of metallized polymer film. Journal of Materials Science 18, 64.
30. Kolosov, D., English, D. S., Bulovic,V., Barbara, P. F., Forrest, S. R. and Thompson, M. E. (2001) Direct observation of structural changes in organic light emitting devices during degradation. Journal of Applied Physics 90(7), 3242.
31. Krug, T., Ludwig, R. and Steiniger, G. (1993) New developments in transparent barrier coatings. 36th Annual Technical Conference Proceedings, Society of Vacuum Coaters, 302.
32. Liew, Y. -F., Aziz, H., Hu, N. -X., Chan, H. S., Xu, G. and Popovic, Z. (2000) Investigation of the sites of dark spots in organic light-emitting devices. Applied Physics Letters 77 (17), 2650.
33. Moro, L., Krajewski, T. A., Rutherford, N. M., Philips, O., Visser, R. J., Gross, M. E., Bennett,W. D. and Graff, G. L. (2004) Process and design of a multilayer thin film encapsulation of passive matrix OLED displays. Proceedings of SPIE 5214, 83-93.
34. Nisato, G., Bouten, P. C. P., Slikkerveer, P. J., Bennett,W. D., Graff, G. L., Rutherford, N. and Wiese, L. (2001) Evaluating high performance diffusion barriers: the calcium test. 21st Annual Asia Display, 8th International Display Workshop, Nagoya, Japan, 1435.
35. Nisato, G., Kuilder, M., Bouten, P., Moro, L., Philips, O. and Rutherford, N. (2003) Thin film encapsulation for OLEDs: evaluation of multi-layer barriers using the Ca test. Society for Information Display, 2003 International Symposium, Digest of Technical Papers, XXXIV, 88.
36. Prins,W. and Hermans, J. J. (1959) Theory of permeation through metal coated polymer films. Journal of Physical Chemistry 63, 716.
37. Roberts, A. P., Henry, B. M., Sutton, A. P., Grovenor, C. R. M., Briggs, G. A. D., Miyamoto, T., Kano, M., Tsukahara, Y. and Yanaka, M. (2002) Gas permeation in silicon-oxide/polymer (SiOx/PET) barrier films: role of the oxide lattice, nano-defects and macro-defects. Journal of Membrane Science 208, 75-88.
38. Rogers, S. P., So, F., Shi, S. Q. and Webb, B. A. (1998) Organic electroluminescent device hermetic encapsulation package, US Patent 5,821,692.
39. Rossi, G. and Nulman, M. (1993) Effect of local flaws in polymeric permeation reducing barriers. Journal of Applied Physics 74, 5471.
40. Schaepkens, M., Erlat, A. G., Kim, T.W., Jan, M., Heller, C. M. and McConnelee, P. (2004) Ultra-high barrier coatings on polymer substrates for flexible optoelectronics: water vapor transport and measurement systems. 47th Annual Technical Conference Proceeding, Society of Vacuum Coaters, 654.
41. Schiller, N., Straach, S., Fahland, M. and Charton, C. (2001) Barrier coatings on plastic web. 44th Annual Technical Conference Proceedings, Society of Vacuum Coaters, 184.
42. Schwarz Packaging Systems (2003) Film barrier chart, www.schwarzflex.com/film.htm
43. Shaw, D. G. and Langlois, M. G. (1994) Use of vapor deposited acrylate coatings to improve the barrier properties of metallized film. 37th Annual Technical Conference Proceedings, Society of Vacuum Coaters, 240.
44. So, F., Shi, S. Q. and Gorsuch, C. A. (1998) Passivation of electroluminescent organic devices. US Patent 5,731,661.
45. Watts, I. (1991) 20 years of resistance source development. 34th Annual Technical Conference Proceedings, Society of Vacuum Coaters, 118.
46. Weaver, M. S., Michalski, L. A., Rajan, K., Rothman, M. A., Silvernail, J. A., Burrows, P. E., Graff, G. L., Gross, M. E., Martin, P. E., Hall, M., Mast, E., Bonham, C., Bennett, W. and Zumhoff, M. (2002) Organic light-emitting devices with extended operating lifetimes on plastic substrates. Applied Physics Letters 81, (16), 2929.
47. Wong, C. P. (1993) Recent advances in IC passivation and encapsulation: process technologies and materials-polymers for electronic and photonic applications, AT&T Bell Laboratories.