Micromanipulation transfer of membrane resonators for circuit optomechanics

Journal of Micromechanics and Microengineering

Volumn 23, Issue 12, 2013, Pages

  Berdova, Maria ^a   Cho, Sung Un ^a,b   Pirkkalainen, Juha Matti ^a   Sulkko, Jaakko ^a   Song, Xuefeng ^a   Hakonen, Pertti J ^a   Sillanpää, Mika A ^a  

^a AALTO UNIVERSITY   (Finland)

^b Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM MEMBRANES; CAPACITIVE COUPLINGS; MECHANICAL RESONATORS; MICRO MANIPULATION; MICROSCOPIC POINTS; MICROWAVE CAVITY; OPTO-MECHANICS; SLIDING CLAMPING;

MICROMANIPULATORS; VAN DER WAALS FORCES;

RESONATORS;

EID: 84889036698     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/12/125024     Document Type: Article

References (20)

1. Regal C A, Teufel J D and Lehnert K W 2008 Nature Phys. 4 555
2. Sillanpää M A, Sarkar J, Sulkko J, Muhonen J and Hakonen P J 2009 Appl. Phys. Lett. 95 011909
3. Sulkko J, Sillanpää M A, Häkkinen P, Lechner L, Helle M, Fefferman A, Parpia J and Hakonen P J 2010 Nano Lett. 10 4884
4. Massel F, Heikkilä T T, Pirkkalainen J M, Cho S U, Saloniemi H, Hakonen P J and Sillanpää M A 2011 Nature 480 351
5. Teufel J D, Li D, Allman M S, Cicak K, Sirois A J, Whittaker J D and Simmonds R W 2011 Nature 471 204
6. Faust T, Krenn P, Manus S, Kotthaus J P and Weig E M 2012 Nature Commun. 3 728
7. Wang K, Wong A-C and Nguyen C-C 2000 J. Microelectromech. Syst. 9 347
8. Cole G D, Wilson-Rae I, Werbach K, Vanner M R and Aspelmeyer M 2011 Nature Commun. 2 231
9. Song X, Oksanen M, Sillanpää M A, Craighead H G, Parpia J M and Hakonen P J 2012 Nano Lett. 12 198
10. Kippenberg T J and Vahala K J 2008 Science 321 1172
11. Nayfeh A H and Mook D T 2008 Nonlinear Oscillations (New York: Wiley)
12. Kacem N and Hentz S 2009 Appl. Phys. Lett. 95 183104
13. Zhao J, Bridges G and Thomson D 2006 J. Vac. Sci. Technol. A 24 732
14. Almog R, Zaitsev S, Shtempluck O and Buks E 2006 Appl. Phys. Lett. 88 213509 (Pubitemid 43814872)
15. Collin E, Bunkov Y M and Godfrin H 2010 Phys. Rev. B 82 235416
16. Villanueva L G, Karabalin R B, Matheny M H, Chi D, Sader J E and Roukes M L 2013 Phys. Rev. B 87 024304
17. Sapmaz S, Blanter Y M, Gurevich L and van der Zant H S J 2003 Phys. Rev. B 67 235414
18. Kozinsky I, Postma H W C, Bargatin I and Roukes M L 2006 Appl. Phys. Lett. 88 253101 (Pubitemid 43954832)
19. Khan R, Massel F and Heikkilä T T 2013 Phys. Rev. B 87 235406
20. Wilson-Rae I 2008 Phys. Rev. B 77 245418